2006
DOI: 10.1109/lpt.2006.885635
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Bidirectional Optical Interconnection at Gb/s Data Rates With Monolithically Integrated VCSEL-MSM Transceiver Chips

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Cited by 14 publications
(4 citation statements)
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“…The lithographic process is similar to the one formerly described in Ref. 4, but an important difference arises due to the implemen- tation of the additional 1 µm-thick Al 0.3 Ga 0.7 As layer. To access the highly p-doped cap layer of the centered VCSEL homogeneously, a dry-etching process is applied followed by wet-etching with a suitable citric acid solution.…”
Section: Transceiver Chip Fabricationmentioning
confidence: 90%
“…The lithographic process is similar to the one formerly described in Ref. 4, but an important difference arises due to the implemen- tation of the additional 1 µm-thick Al 0.3 Ga 0.7 As layer. To access the highly p-doped cap layer of the centered VCSEL homogeneously, a dry-etching process is applied followed by wet-etching with a suitable citric acid solution.…”
Section: Transceiver Chip Fabricationmentioning
confidence: 90%
“…In our first approach, several designs of monolithically integrated VCSELs and MSM photodiodes for 200 and 100 µm core diameter MMFs were presented in [9][10][11][12][13][14][15][16][17][18]. Figure 1 shows a transceiver chip based on an 850 nm VCSEL centered in the MSM PD for efficient coupling to a 100 µm MMF.…”
Section: Previous Workmentioning
confidence: 99%
“…For example, a photodetector placed on top of a VCSEL can be used to dynamically monitor the laser output [1]. Monolithically integrated lasers and photodetectors can be used in a low cost optical transceiver component [2][3][4][5]. The integration of VCSELs with positive-intrinsic-negative (PIN) photodiodes can also be used in biomedical sensing [6].…”
Section: Introductionmentioning
confidence: 99%
“…Three types of detectors can be integrated with VCSELs: metal-semiconductor-metal (MSM) photodetectors [5], resonant cavity photodetectors (RCPDs) [2,3], and PIN photodetectors [1,4,6]. For the positionsensing application, small-area high-sensitivity detectors can be used to spatially resolve reflections from a corrugated surface.…”
Section: Introductionmentioning
confidence: 99%