Bi-material terahertz sensors using metamaterial structures

Alves, Fabio; Grbovic, Dragoslav; Kearney, Brian; Lavrik, Nickolay V.; Karunasiri, Gamani

doi:10.1364/oe.21.013256

Cited by 110 publications

(67 citation statements)

References 41 publications

(32 reference statements)

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“…While this restricts its utilization in radio communication systems, applications such as medical imaging exploit THz band, relying on difference in absorptivity between normal and cancer cells [6]. While sensing in terahertz regime is flourishing, MEMS-based metamaterials have been presented for terahertz applications [7][8]. Variety of imaging and spectroscopy applications in terahertz band has been increasing rapidly including detection of explosives, surveillance and medical screening.…”

Section: Overviewmentioning

confidence: 99%

MEMS-Based Terahertz Detectors

Bilgin¹,

Yalçınkaya²,

Torun³

2015

Procedia Engineering

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A MEMS based novel THz detector structure is designed and realized by micro fabrication. The detector is then characterized to extract its mechanical performance. Operating in 1-5 THz band, the detector has a pixel size of 200 μm × 200 μm. Bimaterial suspension legs consist of Parylene-C and titanium, the pair of which provides a high mismatch in coefficients of thermal expansion. The pixel is a suspended Parylene-C structure having a 200 nm-thick titanium metallization. Operation principle relies on conversion of absorbed THz radiation into heat energy on the pixel. This increases the temperature of the free-standing microstructure that is thermally isolated from the substrate. The increase in temperature induces mechanical deflection due to bimaterial springs. The detector is designed to deliver a noise equivalent temperature difference (NETD) less than 500 mK and a refresh rate of 30Hz. OverviewTHz radiation covers the part of the electro-magnetic (EM) spectrum between the microwaves and infrared (IR), which corresponds to frequencies from 100GHz to 10THz [1]. It has attractive properties, which make it suitable for various applications such as spectroscopy, sensing and imaging [2][3][4]. THz radiation has non-ionizing nature, since THz photons do not carry sufficient energy to ionize an electron from an atom or molecule. Therefore, it does not cause any significant damage to human DNA, as do X-ray imaging techniques.

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Section: Overviewmentioning

confidence: 99%

MEMS-Based Terahertz Detectors

Bilgin¹,

Yalçınkaya²,

Torun³

2015

Procedia Engineering

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“…The absorber portion of the metamaterial device converts incoming electromagnetic radiation to heat, which is then conducted to the bi-material legs of the structure. The legs experience a deformation due to the difference in thermal expansion between the two materials, which is then recorded using an optical readout system [7]. The application of this method across a focal plane array allows for imaging in the THz spectrum.…”

Section: Figure 1 Terahertz Radiation Within the Electromagnetic Spementioning

confidence: 99%

“…A convenient way to compute absorption is by calculating the amount of reflected power back into the Port 1. Since there is no transmission, absorption is given by where abs(S11) 2 represents the reflected power on Port 1 in Figure 6 [7].…”

Section: Input Powermentioning

confidence: 99%

Metamaterial Resonant Absorbers for Terahertz Sensing

Stinson¹

2015

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Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instruction, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing the collection of information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing this burden, to Washington headquarters Services, Directorate for Information Operations and Reports, 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302, and to the Office of Management and Budget, Paperwork Reduction Project (0704-0188) Washington, DC 20503. AGENCY USE ONLY (Leave blank) REPORT DATEDecember 2015 REPORT TYPE AND DATES COVERED 12a. DISTRIBUTION / AVAILABILITY STATEMENTApproved for public release; distribution is unlimited 12b. DISTRIBUTION CODE ABSTRACT (maximum 200 words)The aim of this work is to develop a metamaterial absorber that can be incorporated into a terahertz (THz) imaging system with a 4.7 THz quantum cascade laser (QCL) illumination source. Finite element (FE) simulations were utilized to design metamaterials, and a Fourier transform infrared spectrometer (FTIR) was employed to characterize the absorption spectrum of each metamaterial configuration. Process parameters for future work with the microfabrication devices have been established for the Naval Postgraduate School clean room. Analysis of experimental data provided insight in determining the refractive index of the metamaterial dielectric, SiO x , from 3-8 THz and confirmed the Lorentzian shape for the absorption spectrum as theoretically proposed by another group. Future work will incorporate the metamaterial absorber design of this research into a more efficient, cost effective, bi-material THz sensor that can be employed in a variety of naval applications. SUBJECT TERMS

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“…[11,[16][17][18] However, more in the recent time, the research in this context has been shifted to the terahertz and the visible regions of the electromagnetic spectrum [19][20][21][22][23][24][25] as well.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of nanostructured subwavelength metamaterial absorber operating in the UV and visible spectral range

Baqir¹,

Ghasemi²,

Choudhury³

et al. 2015

Journal of Electromagnetic Waves and Applications

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2015): Design and analysis of nanostructured subwavelength metamaterial absorber operating in the UV and visible spectral range, Journal of Electromagnetic Waves and Applications,The design of broadband metamaterial perfect absorber (MPA) is proposed that operates in the ultraviolet and the visible regions of the electromagnetic spectrum. The MPA structure is of nanoscale in size and comprised of three layers -the U-shaped resonators (made of gold) of subwavelength size are embedded over a nanolayer of dielectric medium (silica glass), which is backed by a copper nanolayer surface. It is found that the proposed structure yields absorption peaks with the absorptivity over 99% in the aforesaid spectral range corresponding to both the transverse electric and the transverse magnetic polarizations of the incident electromagnetic wave. Furthermore, the angular dependence (of the incident light) of absorption characteristics is also analyzed along with the behavior of the absorber under varying thickness of nanosized resonators. It is expected that the proposed kind of perfect absorber would be highly useful in integrated heat-absorbing mediums that would include sensors, integrated photodetectors, thermal imaging, solar cells, etc.

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Bi-material terahertz sensors using metamaterial structures

Cited by 110 publications

References 41 publications

MEMS-Based Terahertz Detectors

MEMS-Based Terahertz Detectors

Metamaterial Resonant Absorbers for Terahertz Sensing

Design and analysis of nanostructured subwavelength metamaterial absorber operating in the UV and visible spectral range

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