BEM modeling of damping forces on MEMS with thin plates

Mukherjee, Subrata; Telukunta, S.; Mukherjee, Yu Xie

doi:10.1016/j.enganabound.2005.05.012

Cited by 24 publications

(16 citation statements)

References 20 publications

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“…-Dynamics problems including damping (see, e.g. Reference [30] for modelling of fluid damping forces in analogous MEMS problems). -Applying the same idea to study charge distribution on narrow conducting beams in MEMS.…”

Section: Discussionmentioning

confidence: 99%

Charge distribution on thin conducting nanotubes—reduced 3‐D model

Chen

Mukherjee

2006

Numerical Meth Engineering

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SUMMARYThe subject of this paper is the calculation of charge distribution on the surfaces of thin conducting nanotubes in electrostatic problems, by the boundary element method (BEM). A line model of a nanotube is proposed here. This model overcomes the problem of dealing with nearly singular matrices that occur when the standard BEM is applied to very thin features (objects or gaps). This new approach is also very efficient. Numerical results are presented for selected examples.

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Section: Discussionmentioning

confidence: 99%

Charge distribution on thin conducting nanotubes—reduced 3‐D model

Chen

Mukherjee

2006

Numerical Meth Engineering

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“…[2][3][4][5]. Now that research focus is being increasingly directed to flow on the small scale and in narrow channels, a new look at the thin film approximation is justified [6,7].…”

Section: Introductionmentioning

confidence: 99%

Convective inertia effects in wall-bounded thin film flows

Szeri

Snyder

2006

Meccanica

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We apply the boundary layer equations to inertial flow in wall bounded films that might be characterized as 'thin', say ε ≤ 0.1 where ε is the ratio of the characteristic lengths, yet to which the lubrication approximation of Reynolds no longer applies. Two particular flow geometries are investigated, nominally parallel plates and nominally inclined plates, both with and without spatially periodic perturbation of the stationary plate. A Galerkin-B spline formulation of the governing equations is employed, and we rely on parametric continuation to obtain solutions at higher values of the Reynolds number. In particular, we are able to demonstrate that the boundary layer equations yield accurate results for a wide range of Reynolds numbers when the aspect ratio is less than 1/10. We also find that in both nominally parallel and nominally inclined geometries the sign of the inertial force correction is determined by the film contour in the neighborhood of the exit, this result might have implications in the design of MEMS devices.

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“…A fully coupled BEM/FEM MEMS calculation with very thin plates has been completed recently [22]. See also [23] for an application of the thin plate idea for modelling damping forces on MEMS with thin plates.…”

Section: Introductionmentioning

confidence: 99%

Charge distribution on narrow MEMS beams of nearly square cross‐section

Chen¹,

Mukherjee²

2007

Commun. Numer. Meth. Engng.

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SUMMARYThe subject of this paper is the calculation of charge distribution on the surfaces of thin conducting microelectromechanical systems beams, of nearly square cross-section, in electrostatic problems, by the boundary element method (BEM). A line model of a beam is proposed here. This model overcomes the problem of dealing with nearly singular matrices that occur when the standard BEM is applied to very thin features (objects or gaps). This new approach is also very efficient. Numerical results are presented for selected examples.

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BEM modeling of damping forces on MEMS with thin plates

Cited by 24 publications

References 20 publications

Charge distribution on thin conducting nanotubes—reduced 3‐D model

Charge distribution on thin conducting nanotubes—reduced 3‐D model

Convective inertia effects in wall-bounded thin film flows

Charge distribution on narrow MEMS beams of nearly square cross‐section

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