Charge distribution on narrow MEMS beams of nearly square cross‐section

Chen, Hui; Mukherjee, Subrata

doi:10.1002/cnm.1021

Cited by 4 publications

(2 citation statements)

References 22 publications

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“…Note that the screening effects due to surface charges are not considered in the present model. However, further improvement of the model requires the inclusion of these effects in calculating the electromechanical response of cantilever nano-actuators [43][44][45]. In nano-structures with the substrate/electrode constructed from semiconductor materials [43] or sensors made of single-walled carbon nanotubes with the diameter approaching the screening length [44], surface charge screening might even swamp nano-scale attractions.…”

Section: Mathematical Modelmentioning

confidence: 99%

“…In nano-structures with the substrate/electrode constructed from semiconductor materials [43] or sensors made of single-walled carbon nanotubes with the diameter approaching the screening length [44], surface charge screening might even swamp nano-scale attractions. Therefore, the finite size and quantum effects must be considered when calculating the surface charge distribution, especially for narrow beams [45].…”

Section: Mathematical Modelmentioning

confidence: 99%

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Investigating the effect of Casimir and van der Waals attractions on the electrostatic pull-in instability of nano-actuators

et al. 2010

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This paper investigates the effect of dispersion (van der Waals and Casimir) forces on the pull-in instability of cantilever nano-actuators by considering their range of application. Adomian decomposition is introduced to obtain an analytical solution of the distributed parameter model. Dispersion forces decrease the pull-in deflection and voltage of a nano-actuator. However, the fringing field increases the pull-in deflection while decreasing the pull-in voltage of the actuator. The minimum initial gap and the detachment length of the actuator that does not stick to the substrate due to van der Waals and Casimir attractions were determined. Furthermore, the proposed approach is capable of determining the stress distribution of the actuator at the onset of instability. It is seen that Casimir and van der Waals attractions effectively reduce the maximum value of stress resultants at the onset of instability. The results indicate that Adomian decomposition is a reliable method for simulating nano-structures at submicrometer ranges.

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Section: Mathematical Modelmentioning

confidence: 99%

Section: Mathematical Modelmentioning

confidence: 99%

Investigating the effect of Casimir and van der Waals attractions on the electrostatic pull-in instability of nano-actuators

et al. 2010

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Free vibration analysis of Timoshenko beams by DSC method

Cívalek

Kiracioglu

2009

Numer Methods Biomed Eng

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SUMMARYFree vibration analysis of Timoshenko beams has been presented. Discrete singular convolution method is used for numerical solution of equation of motion of Timoshenko beam. Clamped, pinned and sliding boundary conditions and their combinations are taken into account. Typical results are presented for different parameters and boundary conditions. Numerical results are presented and compared with that available in the literature. It is shown that very good results are obtained. This method is very effective for the study of vibration problems of Timoshenko beam.

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