“…While the primary function of such films is often electrical or chemical, thin films often support stresses that can be an order of magnitude greater than could be supported by the corresponding bulk material [1][2][3][4][5][6][7][8][9]. These high stresses can lead to film failures in the form of fracture [10], delamination [11], creep [12,13], or void or hillock formation [14].…”