Batch-fabricated CO gas sensor in large-area (8-inch) with sub-10 mW power operation

Choi, Kwang-Wook; Lee, Jae‐Shin; Seo, Min‐Ho; Jo, Min-Seung; Yoo, Jae‐Young; Sim, Gap Seop; Yoon, Jun‐Bo

doi:10.1016/j.snb.2019.03.074

Cited by 29 publications

(27 citation statements)

References 33 publications

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“…Here, CO was chosen as the target gas to detect because it is a colorless, odorless toxic gas, which can be fatal to humans at relatively low concentrations. [ 24 ] It is important to understand that the underlying principle of operation is redox reactions of chemisorbed oxygen molecules on the surfaces of metal‐oxides. Because the chemisorption takes place in the high temperature range of 190–300 °C, [ 36 ] the heater should provide sufficient temperature to the sensing layer.…”

Section: Resultsmentioning

confidence: 99%

“…An air‐suspended double‐clamped beam (Figure 1,i) has been the most widely adopted structure for the ultralow power microheaters, because it provides excellent thermal isolation with minimal heat conduction path. [ 24 ] The effective way to lower the power consumption so far has been downscaling the heating area. To be specific, considering the critical dimensions of the applied lithography tools and the mechanical strength of the air‐suspended structure, the width and thickness of the beam are generally set to be as small as possible, while beam lengths are varied to control the heating area.…”

Section: Resultsmentioning

confidence: 99%

“…The achieved power is one of the lowest levels among state‐of‐the‐art SMO gas sensors. [ 21–25 ] It has been strongly desired to develop always‐on gas sensors that are implementable in mobile devices to ensure a gas‐hazard free environment everywhere in daily life. The ultralow power performance, achieved with geometrically structured nanomaterials, confirms this is a promising nanotechnology for realizing always‐on gas sensors in power‐stringent mobile devices.…”

Section: Introductionmentioning

confidence: 99%

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Perfectly Aligned, Air‐Suspended Nanowire Array Heater and Its Application in an Always‐On Gas Sensor

Choi

Lee

et al. 2020

Adv Funct Materials

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In spite of the excellent thermal properties of nanowires, the typical form factor of unrefined nanowires has restricted their potential use in developing ultralow power electrothermal heater and application device. In this paper, a nanowire array with a perfectly aligned geometric structure on an air-suspended beam is proposed as a novel heating element. By locally confining the generated heat and suppressing beam conduction loss to the substrate, the proposed nanowire array heater overcomes the fundamental power consumption limits of conventional film-type microheaters. As a result, only 2.51 mW of power is required to reach an average temperature of 300 °C, surpassing the performance of state-of-the-art microheaters. The developed nanowire array heater is monolithically integrated with gas sensing nanowires to demonstrate its full capability as an ultralow power gas sensor. The fabricated device successfully detects low concentration carbon monoxide gas of 1 ppm, using less than 5 mW of power. The presented technique offers a promising pathway toward realizing always-on gas sensors driven by battery-powered mobile devices, which will ensure a hazardous gas-free safe environment. In addition, the proposed strategy of employing geometrically structured nanomaterials in the electrothermal heater design enables to lead out their potential thermal capability in many other applications.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Perfectly Aligned, Air‐Suspended Nanowire Array Heater and Its Application in an Always‐On Gas Sensor

Choi

Lee

et al. 2020

Adv Funct Materials

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“…Screen and inkjet printing or drop casting is usually used for thick film deposition, while sputtering is most often used for creating thin films [ 42 , 150 ]. Surface micromachining has been applied aiming to produce uniform and reliable metal oxide (SnO 2 ) gas sensors [ 159 ], while nanofabrication technology has been applied to achieve a nanowire heater with ultralow power consumption [ 160 ]. Figure 7 shows the model of a chemiresistive MOx gas sensor.…”

Section: Sensor Devicementioning

confidence: 99%

Semiconductor Gas Sensors: Materials, Technology, Design, and Application

Nikolić

Milovanović

Vasiljević

et al. 2020

Sensors

308

134

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This paper presents an overview of semiconductor materials used in gas sensors, their technology, design, and application. Semiconductor materials include metal oxides, conducting polymers, carbon nanotubes, and 2D materials. Metal oxides are most often the first choice due to their ease of fabrication, low cost, high sensitivity, and stability. Some of their disadvantages are low selectivity and high operating temperature. Conducting polymers have the advantage of a low operating temperature and can detect many organic vapors. They are flexible but affected by humidity. Carbon nanotubes are chemically and mechanically stable and are sensitive towards NO and NH3, but need dopants or modifications to sense other gases. Graphene, transition metal chalcogenides, boron nitride, transition metal carbides/nitrides, metal organic frameworks, and metal oxide nanosheets as 2D materials represent gas-sensing materials of the future, especially in medical devices, such as breath sensing. This overview covers the most used semiconducting materials in gas sensing, their synthesis methods and morphology, especially oxide nanostructures, heterostructures, and 2D materials, as well as sensor technology and design, application in advance electronic circuits and systems, and research challenges from the perspective of emerging technologies.

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“…Today, gas sensors are being more and more required in diverse safety and healthcare areas since they can detect many kinds of gases that are harmful to humans, such as carbon monoxide (CO), hydrogen (H 2 ), nitric oxide (NO, NO 2 ), and volatile organic compounds (VOCs) 189–192. The common operating mechanism of gas sensors is based on changes in the electrical property of sensing materials when they react with the target gases.…”

Section: High‐performance Sensors Using Geometrically Structured Nanomentioning

confidence: 99%

Geometrically Structured Nanomaterials for Nanosensors, NEMS, and Nanosieves

Seo

Yoo

et al. 2020

Advanced Materials

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Recently, geometrically structured nanomaterials have received great attention due to their unique physical and chemical properties, which originate from the geometric variation in such materials. Indeed, the use of various geometrically structured nanomaterials has been actively reported in enhanced‐performance devices in a wide range of applications. Recent significant progress in the development of geometrically structured nanomaterials and associated devices is summarized. First, a brief introduction of advanced nanofabrication methods that enable the fabrication of various geometrically structured nanomaterials is given, and then the performance enhancements achieved in devices utilizing these nanomaterials, namely, i) physical and gas nanosensors, ii) nanoelectromechanical devices, and iii) nanosieves are described. For the device applications, a systematic summary of their structures, working mechanisms, fabrication methods, and output performance is provided. Particular focus is given to how device performance can be enhanced through the geometric structures of the nanomaterials. Finally, perspectives on the development of novel nanomaterial structures and associated devices are presented.

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Batch-fabricated CO gas sensor in large-area (8-inch) with sub-10 mW power operation

Cited by 29 publications

References 33 publications

Perfectly Aligned, Air‐Suspended Nanowire Array Heater and Its Application in an Always‐On Gas Sensor

Perfectly Aligned, Air‐Suspended Nanowire Array Heater and Its Application in an Always‐On Gas Sensor

Semiconductor Gas Sensors: Materials, Technology, Design, and Application

Geometrically Structured Nanomaterials for Nanosensors, NEMS, and Nanosieves

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