The covalent attachment of small organic molecules and larger functional biomolecules such as DNA, enzymes, or other proteins on semiconductors is a new field of basic research with a pronounced interdisciplinary flavour. The ultimate goal of this endeavour is the creation of novel organic/inorganic heterostructures which can provide a direct link between the complex worlds of biology and digital electronics on a nanometer scale. The purpose of the present survey is to provide an overview over basic physics aspects, preparation methods, as well as possible applications of biofunctionalized semiconductors based on different material systems. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)