2016
DOI: 10.1007/s10854-016-5593-z
|View full text |Cite
|
Sign up to set email alerts
|

Band alignments of O3-based and H2O-based amorphous LaAlO3 films on silicon by atomic layer deposition

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
6
0

Year Published

2021
2021
2023
2023

Publication Types

Select...
5

Relationship

1
4

Authors

Journals

citations
Cited by 5 publications
(6 citation statements)
references
References 20 publications
0
6
0
Order By: Relevance
“…After deconvolution, high-resolution Al 2p spectra of AO (Figure S1A), PAA–AO (Figure S1B), and PAA–AO–PEI (Figure A) NC afford signals at 72.65 ± 1.11 and 74.25 ± 0.14 eV, which are indicative of Al and Al–O (Al 3+ /Al 2 O 3 ) species, respectively. , The deconvoluted high-resolution O 1s spectra of AO (Figure S1C), PAA–AO (Figure S1D), and PAA–AO–PEI NC (Figure B) show bands at 529.54 ± 0.36 and 531.3 ± 0.34 eV that may be attributed to the chemical bond of Al–O and overlapping of Al–O–Al, respectively. , The peaks of C 1s orbitals at binding energies of 283.04 ± 0.79, 285.67 ± 0.27, and 289.07 ± 0.83 eV can be assigned to C–C, C–N, and OC–OH groups, respectively, in PAA–AO (Figure S1E) and PAA–AO–PEI NC (Figure C). Furthermore, the high-resolution deconvoluted peak at 399.70 eV for N 1s orbitals in PAA–AO (Figure S1F) is the characteristic of amide (OC–N) in BAM cross-linker. However, the N 1s spectrum of PAA–AO–PEI (Figure D) was resolved into four peaks at the binding energies of 398.08, 398.69, 399.29, and 400.08 eV, which typically correspond to secondary amino, primary amino, tertiary amino, and amide, respectively. …”
Section: Resultsmentioning
confidence: 99%
“…After deconvolution, high-resolution Al 2p spectra of AO (Figure S1A), PAA–AO (Figure S1B), and PAA–AO–PEI (Figure A) NC afford signals at 72.65 ± 1.11 and 74.25 ± 0.14 eV, which are indicative of Al and Al–O (Al 3+ /Al 2 O 3 ) species, respectively. , The deconvoluted high-resolution O 1s spectra of AO (Figure S1C), PAA–AO (Figure S1D), and PAA–AO–PEI NC (Figure B) show bands at 529.54 ± 0.36 and 531.3 ± 0.34 eV that may be attributed to the chemical bond of Al–O and overlapping of Al–O–Al, respectively. , The peaks of C 1s orbitals at binding energies of 283.04 ± 0.79, 285.67 ± 0.27, and 289.07 ± 0.83 eV can be assigned to C–C, C–N, and OC–OH groups, respectively, in PAA–AO (Figure S1E) and PAA–AO–PEI NC (Figure C). Furthermore, the high-resolution deconvoluted peak at 399.70 eV for N 1s orbitals in PAA–AO (Figure S1F) is the characteristic of amide (OC–N) in BAM cross-linker. However, the N 1s spectrum of PAA–AO–PEI (Figure D) was resolved into four peaks at the binding energies of 398.08, 398.69, 399.29, and 400.08 eV, which typically correspond to secondary amino, primary amino, tertiary amino, and amide, respectively. …”
Section: Resultsmentioning
confidence: 99%
“…Furthermore, the O 1 s core level for combustion-synthesized LaAlO 3 in Fig. 4h consists of three peaks: La–O, La–O–Al, and Al–O at 529 eV, 530.1 eV, and 531.2 eV, respectively 63 65 . In another way, the deconvoluted O 1s peak also contains a slight amount of oxygen vacancies in the lattice and the ratio between the oxide and oxygen vacancy is approximately 10:1 based on their integrated areas, which can contribute to the conductivity of LaAlO 3 (Supplementary Fig.…”
Section: Resultsmentioning
confidence: 97%
“…7d were deconvoluted into three peaks at 530.43 (M-O), 531.35 (O (surface) ), and 532.33 eV (C-O/OH) corresponding to the signals of the oxygen atom associated with metals (lattice oxygen), surface oxygen atoms not associated with metals (non-lattice oxygen), and chemisorbed oxygen species (O/OH), respectively. 53 The M-O and C-O sites were observed to increase after corrosion, while the O (surface) sites decrease, substantiating the oxidation of Al-0.30Mg-0.43Zn during corrosion activity. Furthermore, the Cl 2p XPS spectra of Al-0.30Mg-0.43Zn in Fig.…”
Section: Materials Advances Papermentioning
confidence: 65%