2016
DOI: 10.1063/1.4961626
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(Ba,Sr)TiO3 tunable capacitors with RF commutation quality factors exceeding 6000

Abstract: The fabrication, measurement, and modeling of radio-frequency (RF), tunable interdigital capacitors (IDCs) are described. High quality factors of 200 in the S/L-bands combined with a 47% tunability are achieved by utilizing epitaxial (Ba,Sr)TiO3 films grown by hybrid molecular beam epitaxy on LaAlO3 substrates. The fabricated devices consisted of one-port and two-port IDCs embedded in ground-signal-ground, coplanar waveguide transmission lines to enable RF probing. Wideband RF scattering parameters under bias … Show more

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Cited by 37 publications
(29 citation statements)
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“…From the 2θ XRD data for the (002) peak, the out-of-plane (OOP) lattice parameters of BST and LSMO layer are determined as 3.956A • and 3.843A • , respectively. These are very close to the bulk lattice parameters of BST (3.965A • ) [1][2][3][4][5][6][7] and LSMO (3.870A • ) 12,13 layers. The estimated strain for BST and LSMO layers along the c-direction is ∼0.2% and 0.7%, respectively, which is attributed to unrelaxed thermal and defect-induced strain, and some additional unrelaxed lattice mismatch strain for the BST (delete LSMO and insert BST) layer grown on the LSMO (delete BST and insert LSMO).…”
Section: Resultssupporting
confidence: 73%
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“…From the 2θ XRD data for the (002) peak, the out-of-plane (OOP) lattice parameters of BST and LSMO layer are determined as 3.956A • and 3.843A • , respectively. These are very close to the bulk lattice parameters of BST (3.965A • ) [1][2][3][4][5][6][7] and LSMO (3.870A • ) 12,13 layers. The estimated strain for BST and LSMO layers along the c-direction is ∼0.2% and 0.7%, respectively, which is attributed to unrelaxed thermal and defect-induced strain, and some additional unrelaxed lattice mismatch strain for the BST (delete LSMO and insert BST) layer grown on the LSMO (delete BST and insert LSMO).…”
Section: Resultssupporting
confidence: 73%
“…The magnetic response is not saturated under a 300 Oe field, hence, it is expressed only in magnetic moment (emu), not in emu/cc. [1][2][3][4][5][6][7] The enhancements in H c and H EB at low temperature appears to be directly related to the ferroelectric nature of BST layer, and the resulting strain (∼0.4%) and/or charge redistributions that take place as the BST layer transformed from the cubic (paraelectric) to tetragonal (ferroelectric) phase at low temperature (200K). 18 This may also be consistent with the number of previous reports [19][20][21][22] on the formation of an antiferromagnetic region or layer due to strong pinned spins and magnetic depletion layer observed at various ferromagnetic and ferroelectric interfaces.…”
Section: Fig 2 Magnetic Moment Vs Temperature (M-t) Curves Of Lsmomentioning
confidence: 99%
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“…Usually CQF is used to calculate the figure of merit of devices [2,10], but not of a FE material (Fig. 7).…”
Section: Experiments and Discussionmentioning
confidence: 99%
“…Voltage-controlled passive (tunable filters, phase shifters, reconfigurable antenna arrays, etc.) and active (frequency multipliers and mixers) devices of MW microelectronics can be realized on the basis of FE films [1][2][3][4]. The devices based on FE films have high tuning speed, low power consumption, high power handling capability and low cost.…”
Section: Introductionmentioning
confidence: 99%