This paper presents a review of the machine detection systems for micro-crack inspection of solar wafers and cells. To-date, there are various methods and procedures that have been developed at various laboratories around the world to inspect solar wafers and solar cells for manufacturing defects. This paper on micro-crack detection offers a comprehensive and an up-to-date review of different detection strategies, describing the main features of each technique together with its strengths as well as weaknesses. This paper will benefit researchers and practitioners, especially those who want to develop automatic inspection systems for inspecting solar wafers or solar cells for micro-cracks.