Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo

Chen, Yuan Liu; Cai, Yindi; Tohyama, Keisuke; Shimizu, Yuki; Ito, So; Gao, Wei

doi:10.1016/j.precisioneng.2017.02.014

Cited by 38 publications

(17 citation statements)

References 38 publications

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“…Compared with micro-milling, diamond turning adopts natural single crystal diamond tools with controllable nose radius from millimetres down to dozens of nanometres, making it ideal to fabricate micro/nanostructured surfaces [19][20][21]. Additional oscillations in the turning further extends its capability for the generation of complicated surfaces with high flexibility and high quality [22].…”

Section: Accepted Manuscriptmentioning

confidence: 99%

Modulated diamond cutting for the generation of complicated micro/nanofluidic channels

Zhu

Tong

et al. 2019

Precision Engineering

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A novel modulated diamond cutting (MDC) technique is proposed for the generation of complicated micro/nanofluidic channels. The MDC adopts a turning configuration through a four-axis ultra-precision diamond lathe, a motion modulation based milling operation is introduced by extending the virtual spindle technique. This unique principle makes the MDC more suitable to generate micro/nanofluidic channels through compromising certain inherent advantages of both diamond turning and milling. Moreover, taking advantage of axial servo motion modulation as well as tool mark modulation using the re-cutting e↵ect, complicated channels can be e↵ectively generated having spatially-varying shapes as well as hierarchical micro/nanostructures. Through both numerical simulation and experimental cutting, capability and outperformance of the MDC are demonstrated well. The result suggests that the MDC is capable to generate ultra-smooth channel surfaces with complicated shapes and superimposed surface nanostructures, exhibiting significant superiority for the generation of micro/nanofluidic channels with high flexibility, high e ciency, and high universality.

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Section: Accepted Manuscriptmentioning

confidence: 99%

Modulated diamond cutting for the generation of complicated micro/nanofluidic channels

Zhu

Tong

et al. 2019

Precision Engineering

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“…This phenomenon was attributed to the fact that when the cutting depth, approximately 60 nm, was smaller than D 0 as shown in Figure 5(b), only the spherical cap was involved in the cutting. Let us first calculate D 0 using equation (21), which was approximately 123.5 nm, as follows…”

Section: Scratching With a Single-point Diamond Tipmentioning

confidence: 99%

“…Thus, some scholars referred to the principle of the AFM tip-based nanomechanical machining process to develop force modulation machining systems. [18][19][20][21] Based on the developed systems, the groove arrays with constant machined depth have been fabricated on inclined and curved surfaces. 19,21 However, for the force modulation approach, the relationship between the applied normal force and machined depth is the foundation of the machining accuracy of the structures with desired dimensions.…”

Section: Introductionmentioning

confidence: 99%

“…[18][19][20][21] Based on the developed systems, the groove arrays with constant machined depth have been fabricated on inclined and curved surfaces. 19,21 However, for the force modulation approach, the relationship between the applied normal force and machined depth is the foundation of the machining accuracy of the structures with desired dimensions. Wang et al 22 employed the macrotribology theory to reveal the theoretical relationship between the applied force and machined depth for the multi-pass AFM tipbased machining process.…”

Section: Introductionmentioning

confidence: 99%

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Effect of material removal state on the selection of theoretical models when scratching single-crystal copper using the load modulation approach

Yan

Wang

et al. 2019

Proceedings of the Institution of Mechanical Engineers, Part B:

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This article presents a constant force–controlled cutting approach with two different geometries of cutting tools. The methodologies for establishing two theoretical models were proposed to quantitatively predict the required applied normal forces at the expected machined depths, which were obtained with a solution to the horizontal projection of the sample–tip contact area and the multi-edge form tip based on a generalized cutting approach, respectively. The selection of the proposed theoretical models is dependent on the two material removal states, respectively, in which one is plowing for a regular triangular pyramid and the other one is cutting chips for a single-point diamond tip. To verify the feasibility and effectiveness of the proposed theoretical models and cutting strategy, a constant normal force cutting of microgrooves was implemented on a single-crystal copper substrate, while realizing constant cutting depths. The difference between the setting normal forces and the theoretical normal forces was analyzed by comparing the experimental results and the model prediction results. The aim of the present study was to investigate the effect of the geometry of the cutting tools on the material removal state and on the selection of the theoretical models.

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“…Through a large amount of research, the dimensions of manufactured components range in size from millimeters [7] to micrometers [8,9] or even nanometers [4,10]. In addition, workpiece materials range from ordinary metals [11] to polymers [12], and even brittle materials (such as infrared materials and glass) [13,14], which will further demonstrate the flexibility and broad applicability of FTS technology. Chen et al conducted precise cutting on non-planar brittle materials without knowing surface shapes beforehand by utilizing a force-controlled FTS [13].…”

Section: Introductionmentioning

confidence: 99%

Development of Piezo-Actuated Two-Degree-of-Freedom Fast Tool Servo System

et al. 2019

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Fast tool servo (FTS) machining technology is a promising method for freeform surfaces and machining micro-nanostructure surfaces. However, limited degrees of freedom (DOF) is an inherent drawback of existing FTS technologies. In this paper, a piezo-actuated serial structure FTS system is developed to obtain translational motions along with z and x-axis directions for ultra-precision machining. In addition, the principle of the developed 2-DOF FTS is introduced and explained. A high-rigidity four-bar (HRFB) mechanism is proposed to produce motion along the z-axis direction. Additionally, through a micro-rotation motion around flexible bearing hinges (FBHs), bi-directional motions along the x-axis direction can be produced. The kinematics of the mechanism are described using a matrix-based compliance modeling (MCM) method, and then the static analysis and dynamic analysis are performed using finite element analysis (FEA). Testing experiments were conducted to investigate the actual performance of the developed system. The results show that low coupling, proper travel, and high natural frequency are obtained. Finally, a sinusoidal wavy surface is uniformly generated by the mechanism developed to demonstrate the effectiveness of the FTS system.

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Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo

Cited by 38 publications

References 38 publications

Modulated diamond cutting for the generation of complicated micro/nanofluidic channels

Modulated diamond cutting for the generation of complicated micro/nanofluidic channels

Effect of material removal state on the selection of theoretical models when scratching single-crystal copper using the load modulation approach

Development of Piezo-Actuated Two-Degree-of-Freedom Fast Tool Servo System

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