2010
DOI: 10.1021/nn100276w
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Auger Electron Spectroscopy: A Rational Method for Determining Thickness of Graphene Films

Abstract: We report the determination of the thickness of graphene layers by Auger electron spectroscopy (AES). We measure AES spectra of graphenes with different numbers of layers. The AES spectroscopy shows distinct spectrum shape, intensity, and energy characteristics with an increasing number of graphene layers. We also calculate electron inelastic mean free paths for graphene layers directly from these measurements. The method allows unambiguous and high-throughput determination of thickness up to six graphene laye… Show more

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Cited by 116 publications
(102 citation statements)
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“…However, the Raman spectrum of FLG thicker than five layers can be hardly distinguished from that of bulk graphite, as the stepwise broadened 2D band approaching that of bulk graphite due to continuous splitting of valence and conduction bands. The number of graphene layers can also be determined by SEM [142], Auger electron spectroscopy (AES) [143], nanoindentation [144], optical reflection microscopy [145] and surface plasmon resonance (SPR) [146,147].
10.1080/14686996.2018.1494493-F0008Figure 8.Evolution of the (a) 514 nm and (b) 633 nm Raman spectra near the 2D peak with the number of graphene layers [140] (reused with permission from [140] Copyright © 2006 American Physical Society.
…”
Section: The Structure Of Graphenementioning
confidence: 99%
“…However, the Raman spectrum of FLG thicker than five layers can be hardly distinguished from that of bulk graphite, as the stepwise broadened 2D band approaching that of bulk graphite due to continuous splitting of valence and conduction bands. The number of graphene layers can also be determined by SEM [142], Auger electron spectroscopy (AES) [143], nanoindentation [144], optical reflection microscopy [145] and surface plasmon resonance (SPR) [146,147].
10.1080/14686996.2018.1494493-F0008Figure 8.Evolution of the (a) 514 nm and (b) 633 nm Raman spectra near the 2D peak with the number of graphene layers [140] (reused with permission from [140] Copyright © 2006 American Physical Society.
…”
Section: The Structure Of Graphenementioning
confidence: 99%
“…Recently, we established Auger electron spectroscopy (AES) as a method to characterize the number and structure of graphene layers on arbitrary substrates [58]. We found that AES gives distinct spectrum shape, intensity and energy characteristics with an increasing number of graphene layers ( Figure 2).…”
Section: Auger Electron Characteristics Of Graphene Layersmentioning
confidence: 99%
“…of graphene having wafer size typically used in semiconductor industry. If we restrict ourselves only to the measurement of the average thickness of graphene still many methods can be used; a relatively large selection of possible measurements is discussed in ref [1]. Among the known methods Raman spectroscopy is the most applicable one since it a./ can verify the presence of graphene, b./ measures the defects, c./ can be applied to determine the thickness, and as an optical method provides a simple measurement.…”
Section: Introductionmentioning
confidence: 99%
“…It is interesting that Auger electron spectroscopy (AES), the classical surface sensitive analytical tool, has been rarely used in graphene research. The main reason might be that though the shape of the carbon Auger peak of graphene is strongly different from that of various carbides it is only slightly different from the various graphite forms [1]; thus, the identification of graphene is not completely safe by using AES. On the other hand AES [1,4] as well as X-ray photoelectron spectroscopy (XPS) [5] can be readily applied for the determination of thickness of the graphene layer since the transport (attenuation) of medium energy electrons through ad-layers is well known [6].…”
Section: Introductionmentioning
confidence: 99%
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