Atomistic simulation of ion beam patterning with crater functions

Self-organized nanopatterning of silicon surfaces by ion beam sputtering

“…Note that, as already noted by BH [19], on dimensional grounds such type of non-purely collisional contributions have to occur if one is to describe a ripple wavelength that can be much larger than the average ion penetration depth, a. Crater contributions in any case originate in collisional processes, and unavoidably scale with a. This limitation is overcome in [190], where the surface diffusion taking place at much longer time scales is treated using kinetic Monte Carlo simulations, to conclude again that mass redistribution is the main mechanism for pattern formation on Si.…”

“…In principle this procedure enables a separate evaluation of the contributions to the interface dynamics due to erosion (sputtering) and from redistribution of target atoms. In a number of works on pure Si [130,133,190], it is found that the dominant contribution arises from redistribution.…”

High energy ion irradiation induced surface patterning on a SiO 2 glass substrate

“…However, these modes of energy-losses strongly depend on ion energies, masses of projectiles and target atoms. These parameters for ion-beam and target materials define many of the observed ionbeam phenomena in a solid [14][15][16]. Effects of high energy and heavy ion-beam processes about pattern formations on surfaces have been discussed in this report.…”

Kinetic Monte Carlo simulation of self-organized pattern formation induced by ion beam sputtering using crater functions

“…The height of each cell is determined by the highest atom in the corresponding column. In this way, the actual crater data from MD is used, as opposed to a functional fit such as the difference-of-Gaussians used in previous works 23,24 .…”

“…Figure 1 shows graphically how the treatment given in this model differs from previous work and places the present work in context. 24 has demonstrated its usefulness for studying pattern formation. The results have shown that the absence of ripple formation at low angles is due to mass redistribution rather than erosion.…”