“…Knowing that the material systems in question here are susceptible to crystal structure modification due to plasma treatmentby both etching and chemical substitutionwe can contextualize what this means for charge transport in these low-dimensional systems. The ability to freely and controllably introduce defects and dopants into 2D semiconductors allows one to potentially tune the various well-understood parameters at the heart of FET device physics, namely, the gate threshold voltage, , charge carrier mobility, , trap density, , contact resistance, ,, Fermi level pinning, , the nature of the depletion region, , subthreshold swing, ,, hot carrier injection, − noise in the drive current, − free carrier screening ,,, and the dielectric environment at large. , Although an exhaustive list would include many more parameters here, we go on to overview the effects of plasma treatment on some of these electrical characteristics in FETs based on 2D semiconductors.…”