Atomic Layer Deposition of V_1–xMo_xO₂ Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation

Abstract

VMoO thin films were fabricated by nanolamination of VO/MoO alternating layers using atomic layer deposition (ALD) process, in which tetrakis-dimethyl-amino vanadium(IV) [V(NMe)] and molybdenum hexacarbonyl(VI) [Mo(CO)] were used as vanadium and molybdenum precursors, respectively. The dopant content of VMoO films was controlled by adjusting MoO cycle percentage (P) in ALD pulse sequence, which varied from 2 to 10%. Effects of P on VMoO crystal structure, morphology, semiconductor-to-metal transition properties, and optical transmittance were studied. A linear reduction of phase transition temperature (T) by approximately -11 °C/cycle % Mo was observed for VMoO films within P ≤ 5%. Notably, dramatic enhanced luminous transmittance (T = 63.8%) and solar modulation (ΔT = 23.5%) were observed for VMoO film with P = 7%.

Atomic layer deposition of vanadium oxides: process and application review

“…According to this method, ultrathin nanolaminates of different materials are alternately deposited by successive ALD cycles and doping is facilitated upon high temperature annealing via interlayer diffusion. A first attempt in the context of smart windows was made by Lv et al in, [194], where doping with Mo up to levels of 10 at% was examined and results were encouraging.…”

Electron–Proton Co‐doping‐Induced Metal–Insulator Transition in VO2 Film via Surface Self‐Assembled l‐Ascorbic Acid Molecules

“…Controlling the charge density is an effective way to modulate competitively electronic phases of VO 2 . At present, the main control methods include atomic doping and the electric‐field gating with ionic liquid as the dielectric layer. Charge transferring complexes in coordination chemistry can donate charges to VO 2 crystal .…”

Scandium: An efficient dopant to modulate the optical spectrum of vanadium dioxide (VO2)

“…There are few limitations to use VO 2 for smart window applications: (a) High T SMT , which has been overcome by adding dopants in vanadium site [17,[24][25][26][27][28][29][30] and the minimum value for T SMT has been observed to be ~ 25…”