Atomic layer deposition of titanium dioxide thin films from tetraethoxytitanium and water

Alekhin, A. P.; Lapushkin, G. I.; Markeev, Andrey M.; Sigarev, A. A.; Toknova, V. F.

doi:10.1134/s1027451010030043

Cited by 6 publications

(3 citation statements)

References 10 publications

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“…Due to the promising application potential in the field of catalysis and renewable energy, [38][39][40][41][42][43][44] TiO 2 thin film ALD has been intensively studied. [45][46][47][48][49][50] However, to our best knowledge, this is the first strategy for successfully growing a 3D TiO 2 NR network architecture in highly confined spaces, which might also be applied to a variety of other functional materials.…”

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confidence: 99%

“…Control experiments suggested that the growth of TiO 2 NRs might undergo a surface-reaction-limited chemical vapor deposition (CVD) process, and this synthesis approach is thus considered as pulsed CVD. Due to the promising application potential in the field of catalysis and renewable energy, − TiO 2 thin film ALD has been intensively studied. − However, to our best knowledge, this is the first strategy for successfully growing a 3D TiO 2 NR network architecture in highly confined spaces, which might also be applied to a variety of other functional materials.…”

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confidence: 99%

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Growth of Titanium Dioxide Nanorods in 3D-Confined Spaces

Shi¹,

Sun²,

Starr³

et al. 2011

Nano Lett.

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Three-dimensional (3D) nanowire (NW) networks are promising architectures for effectively translating the extraordinary properties of one-dimensional objects into a 3D space. However, to uniformly grow NWs in a 3D confined space is a serious challenge due to the coupling between crystal growth and precursor concentration that is often dictated by the mass flow characteristic of vapor or liquid phase reactants within the high-aspect ratio submicrometer channels in current strategies. We report a pulsed chemical vapor deposition (CVD) process that successfully addressed this issue and grew TiO(2) nanorods uniformly covering the entire inner surface of highly confined nanochannels. We propose a mechanism for the anisotropic growth of anatase TiO(2) based on the surface-reaction-limited CVD process. This strategy would lead to the realization of NW-based 3D nanoarchitectures from various functional materials for the applications of sensors, solar cells, catalysts, energy storage systems, and so forth.

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confidence: 99%

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Growth of Titanium Dioxide Nanorods in 3D-Confined Spaces

Shi¹,

Sun²,

Starr³

et al. 2011

Nano Lett.

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“…TiO2 is well known for its high stability in most media and good biocompatibility [124], and it has shown HA forming ability in in vitro tests after soaking in simulated body fluid [125], opening the possibility to promote the osseointegration of Ti-based implants while enhancing the surface hardness and the corrosion protection. In addition, TiO2 also possess interesting semiconductive, photocatalytic and optical properties which have made it a very attractive material for microelectronic devices [126], [127].…”

Section: Biocompatibilitymentioning

confidence: 99%

Ultra-fine grained pure Titanium for biomedical applications

Mora-Sanchez

Sabirov

Monclús

et al. 2016

Materials Technology

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UltraFine-Grained Commercially Pure Titanium (UFG CP Ti) has arisen as one of the best prospects for the fabrication of implantable appliances due to the superior biocompatibility of CP Ti with respect to the other metallic systems used in the biomedical field, and to the enhanced mechanical properties provided by the refined microstructure obtained through Severe Plastic Deformation (SPD) processes. However, the bioinert character of CP Ti makes necessary to improve the osteoconductivity of the surface in order to ensure a rapid and successful osseointegration. Surface modification approaches including physical and/or chemical roughening and the fabrication of bioactive coatings have been shown to improve the cell adhesion and proliferation and osteoconductivity of CG and UFG CP Ti. In particular, the Plasma Electrolytic Oxidation (PEO) technique is one of the most promising approaches to fabricate thin TiO2-based Ca-and P-containing coatings. These type of coatings provide a suitable combination of surface topography and chemistry for applications that require osteoconductive properties. However, there is a relative lack of knowledge regarding the PEO treatment of UFG CP Ti in comparison with the significant body of research on the PEO treatment of CG CP Ti.The present Thesis is focused on the surface modification of UFG CP Ti to improve its osteoconductivity. The effect of the surface topography of chemically etched UFG CP Ti on the cell adhesion and proliferation was assessed. It was observed that the cell proliferation was dependent on the characteristics of the surface topography. The main body of the Thesis consisted on the fabrication of PEO coatings on both CG and UFG CP Ti using three different electrolytes, one of them aimed to produce Ca-and P-containing coatings. The main objective of this study was twofold: First, to compare the resulting corrosion resistance, cell-surface interaction, and mechanical properties of the three PEO treatments; and second, to compare the applicability of the PEO treatment and the coatings obtained on both CG and UFG CP Ti. The UFG microstructure was found to influence the coatings growth rate, the discharge generation of each treatment and the microstructure of the layers in intimate contact with the substrate. At the same time, the latter was found to cause significant differences in the corrosion behaviour between the CG CP Ti-coated and the UFG CP Ti-coated samples. The mechanical performance of the coatings was strongly dependent on the microstructure of the outer layers of the coatings. The Ca-and P-containing coating fabricated for 120 s on the UFG CP Ti presented the highest celular proliferation rate and metabolic activity showing potential for osteoinductive and osteoconductive capabilities. In order to improve the mechanical performance of the coatings an alternative approach to the common methods for hardening of PEO coatings was proposed.

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