Atomic layer deposition of palladium films on Al2O3 surfaces

Elam, Jeffrey W.; Zinovev, A. V.; Han, Catherine Y.; Wang, Hsien‐Hau; Welp, U.; Hryn, John N.; Pellin, Michael J.

doi:10.1016/j.tsf.2006.05.049

Cited by 163 publications

(207 citation statements)

References 37 publications

Supporting

Mentioning

198

Contrasting

Order By: Relevance

“…Recently, porous anodic aluminum oxide (AAO), a highly ordered nano-pore array, has attracted considerable attention as a nanotemplate for the synthesis of various nanostructures, 1 such as nanowires, 2-4 nanotubes, 5 nanodots, 6,7 semiconductors, 4,8 and superconductors. 9 These applications involve electrochemical deposition, 2,3 atomic layer deposition, 6,7 and chemical vapor deposition.…”

Section: Introductionmentioning

confidence: 99%

“…9 These applications involve electrochemical deposition, 2,3 atomic layer deposition, 6,7 and chemical vapor deposition. 10 Porous alumina membrane formed by the anodization of aluminum consists of a close-packed array of hexagonal cells, each containing a cylindrical central pore.…”

Section: Introductionmentioning

confidence: 99%

“…Most reports on the anodizing of aluminum use high-purity aluminum for improving the quality of porous alumina membranes. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] However, few studies have been conducted on the anodization of low-purity aluminum. [21][22][23][24][25][26][27][28][29] Fabrication of anodic alumina membranes from low-purity aluminum foil is not trivial and often requires specific conditions, different from those typically applied to the anodization of high-purity aluminum.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Effect of Aluminum Purity on the Pore Formation of Porous Anodic Alumina

Kim¹,

Lee

2014

Bulletin of the Korean Chemical Society

View full text Add to dashboard Cite

Anodic alumina oxide (AAO), a self-ordered hexagonal array, has various applications in nanofabrication such as the fabrication of nanotemplates and other nanostructures. In order to obtain highly ordered porous alumina membranes, a two-step anodization or prepatterning of aluminum are mainly conducted with straight electric field. Electric field is the main driving force for pore growth during anodization. However, impurities in aluminum can disturb the direction of the electric field. To confirm this, we anodized two different aluminum foil samples with high purity (99.999%) and relatively low purity (99.8%), and compared the differences in the surface morphologies of the respective aluminum oxide membranes produced in different electric fields. Branched pores observed in porous alumina surface which was anodized in low-purity aluminum and the size; dimensions of the pores were found to be usually smaller than those obtained from high-purity aluminum. Moreover, anodization at high voltage proceeds to a significant level of conversion because of the high speed of the directional electric field. Consequently, anodic alumina membrane of a specific morphology, i.e., meshed pore, was produced.

show abstract

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Effect of Aluminum Purity on the Pore Formation of Porous Anodic Alumina

Kim¹,

Lee

2014

Bulletin of the Korean Chemical Society

View full text Add to dashboard Cite

show abstract

“…To gain new properties of materials related to their nanometric size in at least one dimension, nanowires [2][3][4][5][6][7][8][9][10][11], nanotubes [12,13] and nanodots [14,15] made of various materials like metals and alloys [2-5, 14, 15], semiconductors [6,7], superconductors [8] and polymers [10][11][12][13] were obtained using various techniques, including electrochemical deposition [2][3][4][5][10][11][12], sol-gel technique [6,8], atomic layer deposition [14,15], and chemical vapor deposition [9]. Recently, fabrication of many devices based on anodic aluminum oxide (AAO) has been also reported [16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Analysis of nanopore arrangement and structural features of anodic alumina layers formed by two-step anodizing in oxalic acid using the dedicated executable software

et al. 2013

View full text Add to dashboard Cite

Anodic porous alumina layers were fabricated by a two-step self-organized anodization in 0.3 M oxalic acid under various anodizing potentials ranging from 30 to 60 V at two different temperatures (10 and 17 • C). The effect of anodizing conditions on structural features and pore arrangement of AAO was investigated in detail by using the dedicated executable publication combined with ImageJ software. With increasing anodizing potential, a linear increase of the average pore diameter, interpore distance, wall thickness and barrier layer thickness, as well as a decrease of the pore density, were observed. In addition, the higher pore diameter and porosity values were obtained for samples anodized at the elevated temperature, independently of the anodizing potential. A degree of pore order was investigated on the basis of Delaunay triangulations (defect maps) and calculation of pair distribution or angle distribution functions (PDF or ADF), respectively. All methods confirmed that in order to obtain nanoporous alumina with the best, hexagonal pore arrangement, the potential of 40 V should be applied during anodization. It was confirmed that the dedicated executable publication can be used to a fast and complex

show abstract

“…This behavior is typical of most ALD metal oxides and results from the prompt nucleation or initiation of metal oxide ALD on most surfaces (due to the ubiquity of OH groups), and usually generates very uniform, continuous films. In contrast, the ALD of noble metals such as palladium often shows a long incubation period on oxide surfaces 7 . This nucleation delay stems from the difficulty in removing the ligands from the noble metal precursor bound to an oxide surface.…”

Section: Introductionmentioning

confidence: 99%