Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications

Dimitrov, Dimitre; Tsai, Che Liang; Petrov, Stefan; Marinova, Vera; Petrova, Dimitrina; Napoleonov, Blagovest; Blagoev, B.; Strijkova, Velichka; Hsu, Ken Yuh; Lin, Shiuan Huei

doi:10.3390/coatings10060539

Cited by 42 publications

(24 citation statements)

References 29 publications

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“…To sum up, the optimal AZO films exhibit a low resistivity of about 1 Ω·cm and a high transmittance above 75%, which are comparable to previous works [ 19 , 22 , 25 ]. Thus, the ALD-deposited AZO films in this work have a great potential to be used as transparent electrodes.…”

Section: Resultssupporting

confidence: 88%

“…Recently, the ALD process has been of increasing interest in the fabrication of AZO films. Dimitrov et al [ 19 ], Marques et al [ 20 ], and Li et al [ 21 ] studied ALD-deposited flexible AZO films with high transmittance and low resistance. Swatowska et al [ 22 ], Li et al [ 23 ], and Wu et al [ 24 ] investigated Al concentration on the properties of ALD-deposited AZO films.…”

Section: Introductionmentioning

confidence: 99%

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Investigation on Transparent, Conductive ZnO:Al Films Deposited by Atomic Layer Deposition Process

et al. 2022

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Transparent electrodes are a core component for transparent electron devices, photoelectric devices, and advanced displays. In this work, we fabricate fully-transparent, highly-conductive Al-doped ZnO (AZO) films using an atomic layer deposition (ALD) system method of repeatedly stacking ZnO and Al2O3 layers. The influences of Al cycle ratio (0, 2, 3, and 4%) on optical property, conductivity, crystallinity, surface morphology, and material components of the AZO films are examined, and current conduction mechanisms of the AZO films are analyzed. We found that Al doping increases electron concentration and optical bandgap width, allowing the AZO films to excellently combine low resistivity with high transmittance. Besides, Al doping induces preferred-growth-orientation transition from (002) to (100), which improves surface property and enhances current conduction across the AZO films. Interestingly, the AZO films with an Al cycle ratio of 3% show preferable film properties. Transparent ZnO thin film transistors (TFTs) with AZO electrodes are fabricated, and the ZnO TFTs exhibit superior transparency and high performance. This work accelerates the practical application of the ALD process in fabricating transparent electrodes.

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Section: Resultssupporting

confidence: 88%

Section: Introductionmentioning

confidence: 99%

Investigation on Transparent, Conductive ZnO:Al Films Deposited by Atomic Layer Deposition Process

et al. 2022

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“…The time required for transmittance to change from T 10% to T 90% is the response time. The obtained response time and the decay time values of ~78 ms and ~74 ms, respectively are in good agreement with those reported for PDLC-based devices using other transparent contacts [ 37 , 38 , 39 ].…”

Section: Resultssupporting

confidence: 89%

ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices

et al. 2021

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In this work, highly conductive Al-doped ZnO (AZO) films are deposited on transparent and flexible muscovite mica substrates by using the atomic layer deposition (ALD) technique. AZO-mica structures possess high optical transmittance at visible and near-infrared spectral range and retain low electric resistivity, even after continuous bending of up to 800 cycles. Structure performances after bending tests have been supported by atomic force microscopy (AFM) analysis. Based on performed optical and electrical characterizations AZO films on mica are implemented as transparent conductive electrodes in flexible polymer dispersed liquid crystal (PDLC) devices. The measured electro-optical characteristics and response time of the proposed devices reveal the higher potential of AZO-mica for future ITO-free flexible optoelectronic applications.

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“…The nonlinear two-photon absorption coefficient of titanium dioxide was determined by means of the laser-induced deflection technique at a wavelength of 800 nm. Dimitrov et al [3] demonstrated transparent and conductive aluminum-doped zinc oxide (AZO) thin films deposited on rigid and transparent substrates through atomic layer deposition. Applications as transparent conductive layers in AZO/glass-supported liquid crystal displays and flexible polymer-dispersed liquid crystal devices were discussed.…”

Section: Brief Overview Of the Contributions To This Special Issuementioning

confidence: 99%

Special Issue: “Optical Thin Films and Structures: Design and Advanced Applications”

Babeva

2020

Coatings

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This Special Issue is devoted on design and application of thin films and structures with special emphasis on optical applications. It comprises ten papers, five featured and five regular papers, authored by respective scientists all over the world. Diverse materials are studied and their possible applications are demonstrated and discussed: transparent conductive coatings and structures from ZnO doped with Al and Ga and Ti-doped SnO2, polymer and nanosized zeolite thin films for optical sensing, TiO2 with linear and non-linear optical properties, organic diamagnetic materials, broadband optical coatings, CrWN glass molding coatings and silicon on insulator waveguides.

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Atomic Layer-Deposited Al-Doped ZnO Thin Films for Display Applications

Cited by 42 publications

References 29 publications

Investigation on Transparent, Conductive ZnO:Al Films Deposited by Atomic Layer Deposition Process

Investigation on Transparent, Conductive ZnO:Al Films Deposited by Atomic Layer Deposition Process

ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices

Special Issue: “Optical Thin Films and Structures: Design and Advanced Applications”

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