2018
DOI: 10.1134/s1063784218080182
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Atomic Force Microscopy Measurement of the Resistivity of Semiconductors

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Cited by 11 publications
(3 citation statements)
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“…In many existing methods for manufacturing high aspect ratio probes, besides the aforementioned wet etching of silicon techniques, common approaches include dry etching or a combination of dry and wet etching, FIB milling, and electron beam-induced deposition (EBID) . While wet etching offers cost advantages, KOH etching is highly dependent on crystal orientation and demands strict mask alignment; HF: HNO 3 : CH 3 COOH etching struggles to maintain a stable etching rate .…”
Section: Preparation and Modification Of Afm Probe Tipmentioning
confidence: 99%
See 1 more Smart Citation
“…In many existing methods for manufacturing high aspect ratio probes, besides the aforementioned wet etching of silicon techniques, common approaches include dry etching or a combination of dry and wet etching, FIB milling, and electron beam-induced deposition (EBID) . While wet etching offers cost advantages, KOH etching is highly dependent on crystal orientation and demands strict mask alignment; HF: HNO 3 : CH 3 COOH etching struggles to maintain a stable etching rate .…”
Section: Preparation and Modification Of Afm Probe Tipmentioning
confidence: 99%
“…On the other hand, AFM possesses in situ precise mechanical analysis capabilities and strong scalability that are not available in other morphological characterization tools. In addition to obtaining information such as material elasticity, hardness, and Hamaker constants, AFM can acquire the ability to characterize electrical and magnetic properties , by assembling different modules and probes. Moreover, utilizing probe modification techniques enables the attachment of individual organic molecules, particles, or cells onto AFM probes, thereby facilitating quantitative analysis of the interactions between different substances.…”
Section: Basic Introduction To Afmmentioning
confidence: 99%
“…At the present stage of nanotechnology development, one of the most promising methods for surface diagnostics is scanning probe microscopy (SPM). The use of SPM methods allows the study of the local geometric, electrical, and mechanical properties of the sample surface [23][24][25][26].…”
Section: Introductionmentioning
confidence: 99%