1987
DOI: 10.1063/1.338807
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Atomic force microscope–force mapping and profiling on a sub 100-Å scale

Abstract: A modified version of the atomic force microscope is introduced that enables a precise measurement of the force between a tip and a sample over a tip-sample distance range of 30–150 Å. As an application, the force signal is used to maintain the tip-sample spacing constant, so that profiling can be achieved with a spatial resolution of 50 Å. A second scheme allows the simultaneous measurement of force and surface profile; this scheme has been used to obtain material-dependent information from surfaces of electr… Show more

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Cited by 1,320 publications
(634 citation statements)
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“…EFM [20][21][22][23][24][25][26][27] simultaneously measures surface topography and the electrostatic force gradients above the surface. A conductive probe is electrically connected to the conducting substrate.…”
Section: Methodsmentioning
confidence: 99%
“…EFM [20][21][22][23][24][25][26][27] simultaneously measures surface topography and the electrostatic force gradients above the surface. A conductive probe is electrically connected to the conducting substrate.…”
Section: Methodsmentioning
confidence: 99%
“…The shift is determined by the gradient of the force. Vice versa, from the measured shift of the resonance frequency the force gradient can be calculated [11].…”
Section: Dynamic Force Measurementsmentioning
confidence: 99%
“…This stimulated the measurement of magnetic [7][8][9][10] and electrostatic forces [11][12][13] and led to the development of magnetic force, electric force, and Kelvin probe microscopy [14]. The goal was not so much to understand the force but to image the distribution of magnetization, charge, or surface potential, respectively.…”
Section: Introductionmentioning
confidence: 99%
“…The excitation method using a piezoelectric actuator has been most commonly used [35]. However, the amplitude and phase versus frequency curves obtained by this method show large distortions due to the vibrations at the spurious resonances in the cantilever and sample holders.…”
Section: Instability Of Cantilever Excitationmentioning
confidence: 99%