2014
DOI: 10.1016/j.tsf.2013.08.009
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Atmospheric pressure chemical vapor deposition of ZnO: Process modeling and experiments

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Cited by 12 publications
(6 citation statements)
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“…The back contact of thin film solar cells is usually a metal, which has a much lower sheet resistance and no trade‐off in transparency and is not considered as a bottleneck. As a consequence, much research has been devoted to improving the material quality of this front contact and its deposition process . However, it was shown that the combination of a metallic grid and a TCO can result in a much higher conductivity, with only a small sacrifice in transmittance .…”
Section: Introductionmentioning
confidence: 99%
“…The back contact of thin film solar cells is usually a metal, which has a much lower sheet resistance and no trade‐off in transparency and is not considered as a bottleneck. As a consequence, much research has been devoted to improving the material quality of this front contact and its deposition process . However, it was shown that the combination of a metallic grid and a TCO can result in a much higher conductivity, with only a small sacrifice in transmittance .…”
Section: Introductionmentioning
confidence: 99%
“…Generally, the important parameters to evaluate the quality of MOCVD epitaxial growth technology are: the crystal growth rate, uniform components, doping concentration and thickness on the crystal surface, the crystal interface roughness, and the utilization rate of each source material. 25 Therefore, it is necessary to clearly understand the flow state of the reactants in the reactor. The temperature field and flow field distribution are the main factors to effective control the mass and heat transfer effect.…”
Section: Resultsmentioning
confidence: 99%
“…The process of chemical vapor deposition is divided into the following steps: (1) the diffusion of reactive gas flow to the substrate surface, (2) the adsorption of the reactive gas flow to the substrate surface, (3) the formation of film by chemical reaction on the substrate surface, and (4) the desorption of gaseous byproducts from the substrate surface (Figure 10). 87 Compared to physical vapor deposition, chemical vapor deposition provides excellent coating performance and is suitable for coating complex surface and internal pores. It allows for simple control of the composition and properties of synthetic coatings and thus is cost-effective and suitable for large scale of production.…”
Section: Traditional Preparation Methods 311 Physicalmentioning
confidence: 99%