Atmospheric oxygen plasma activation of silicon (100) surfaces

Habib, Sara B.; Gonzalez, Eleazar; Hicks, Robert F.

doi:10.1116/1.3374738

Cited by 38 publications

(31 citation statements)

References 35 publications

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“…It may be possible to replace the UVO treatment with an oxygen plasma treatment of the Si surface to achieve a hydrophilic wettable surface for SnO 2 deposition without the formation of a barrier oxide layer but only a monolayer of oxide. 49 An added advantage of a plasma treatment is the resultant defective surface 50 that aids the surface recombination for carrier transport between Si and SnO 2 . To achieve a tandem efficiency of 30%, J SC 4 20 mA cm À2 , V OC 4 1.8 V and FF 4 0.8 (requiring R S o 2 O cm 2 ) will be required.…”

Section: à2mentioning

confidence: 99%

Large area efficient interface layer free monolithic perovskite/homo-junction-silicon tandem solar cell with over 20% efficiency

Zheng

Lau

Mehrvarz

et al. 2018

Energy Environ. Sci.

197

186

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aMonolithic perovskite/silicon tandem solar cells show great promise for further efficiency enhancement for current silicon photovoltaic technology. In general, an interface (tunnelling or recombination) layer is usually required for electrical contact between the top and the bottom cells, which incurs higher fabrication costs and parasitic absorption. Most of the monolithic perovskite/Si tandem cells demonstrated use a hetero-junction silicon (Si) solar cell as the bottom cell, on small areas only. This work is the first to successfully integrate a low temperature processed (r150 1C) planar CH 3 NH 3 PbI 3 perovskite solar cell on a homo-junction silicon solar cell to achieve a monolithic tandem without the use of an additional interface layer on large areas (4 and 16 cm 2 ).Solution processed SnO 2 has been effective in providing dual functions in the monolithic tandem, serving as an ETL for the perovskite cell and as a recombination contact with the n-type silicon homo-junction solar cell that has a boron doped p-type (p++) front emitter. The SnO 2 /p++ Si interface is characterised in this work and the dominant transport mechanism is simulated using Sentaurus technology computer-aided design (TCAD) modelling. The champion device on 4 cm 2 achieves a power conversion efficiency (PCE) of 21.0% under reverse-scanning with a V OC of 1.68 V, a J SC of 16.1 mA cm À2 and a high FF of 78% yielding a steady-state efficiency of 20.5%. As our monolithic tandem device does not rely on the SnO 2 for lateral conduction, which is managed by the p++ emitter, up scaling to large areas becomes relatively straightforward. On a large area of 16 cm 2 , a reverse scan PCE of 17.6% and a steady-state PCE of 17.1% are achieved. To our knowledge, these are the most efficient perovskite/homo-junction-silicon tandem solar cells that are larger than 1 cm 2 . Most importantly, our results demonstrate for the first time that monolithic perovskite/silicon tandem solar cells can be achieved with excellent performance without the need for an additional interface layer. This work is relevant to the commercialisation of efficient large-area perovskite/homo-junction silicon tandem solar cells. Broader contextA simple approach for integrating a perovskite solar cell monolithically onto a Si solar cell is reported here. The first advantage of this approach is that it does not require additional fabrication of an additional interface layer between the perovskite and Si cell. The second advantage of this approach is that it is compatible with a homo-junction p-n Si solar cell, which is a common Si solar cell structure for commercial cells. The third advantage is that the entire sequence for the planar perovskite cell fabrication is done at low temperatures, minimising damage to the bottom Si solar cell. The fourth advantage is that the SnO 2 electron transport layer of the perovskite top cell also serves as a recombination contact with the silicon bottom cell. Finally, this monolithic tandem approach does not rely on the SnO 2 for lateral conducti...

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Section: à2mentioning

confidence: 99%

Large area efficient interface layer free monolithic perovskite/homo-junction-silicon tandem solar cell with over 20% efficiency

Zheng

Lau

Mehrvarz

et al. 2018

Energy Environ. Sci.

197

186

View full text Add to dashboard Cite

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“…The solid lines in Fig. 14,38 An important figure of merit is the background concentration of organic contamination necessary to drive the adsorption process. (5) to the data.…”

Section: Discussionmentioning

confidence: 99%

“…[18][19][20][21][22][23][24][25] The isolated silanol groups tend to be the sites where selective adsorption takes place. 20 Habib et al 14 have shown that the native oxide on silicon exposed to the atmospheric pressure helium and oxygen plasma exhibits hydrophilic behavior with a water contact angle less than 5 . 20 Habib et al 14 have shown that the native oxide on silicon exposed to the atmospheric pressure helium and oxygen plasma exhibits hydrophilic behavior with a water contact angle less than 5 .…”

Section: Introductionmentioning

confidence: 99%

Aging mechanism of the native oxide on silicon (100) following atmospheric oxygen plasma cleaning

Williams

Hicks

2011

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Articles you may be interested inEvolution of titanium residue on the walls of a plasma-etching reactor and its effect on the polysilicon etching rate Silicon native oxide surfaces were cleaned with a radio frequency, atmospheric pressure helium and oxygen plasma and with an RCA standard clean-1. Both processes create a hydrophilic state with water contact angles of <5 and 16.2 6 1.7 , respectively. During subsequent storage in a chamber purged with boil off from a liquid nitrogen tank, the water contact angle increased over time at a rate dependent on the cleaning method used. Internal reflection infrared spectroscopy revealed that the change in water contact angle was due to the adsorption of organic molecules with an average hydrocarbon chain length of 10 6 2. The rate of the adsorption process decreased with the fraction of hydrogen-bonded hydroxyl groups on the surface relative to those groups that were isolated. On Si (100) surfaces that were cleaned by RCA standard clean-1 and then the plasma, 95.8% of the silanol groups were hydrogen bonded. The first-order rate constant for adsorption of the organic contaminant on this surface was 0.182 6 0.008 h À1 .

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“…This process creates a monolayer of covalently bound oxygen on the surface of the wafer. [32] The bonds of this monolayer are highly strained and readily react with available atmospheric H 2 O to form hydroxyl groups on the surface. The hydroxyl groups were reacted with the silane coupling agent, APTMS, in a vacuum desiccator for at least 15 minutes to form a linker between the inorganic substrate and an organic end group (in this case, a primary amine).…”

Section: Methodsmentioning

confidence: 99%

Selective patterning of Si-based biosensor surfaces using isotropic silicon etchants

Biggs

Hunt

Armani

2012

Journal of Colloid and Interface Science

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Ultra-sensitive, label-free biosensors have the potential to have a tremendous impact on fields like medical diagnostics. For the majority of these Si-based integrated devices, it is necessary to functionalize the surface with a targeting ligand in order to perform both specific biodetection. To do this, silane coupling agents are commonly used to immobilize the targeting ligand. However, this method typically results in the bioconjugation of the entire device surface, which is undesirable. To compensate for this effect, researchers have developed complex blocking strategies that result in selective patterning of the sensor surface. Recently, silane coupling agents were used to attach biomolecules to the surface of silica toroidal biosensors integrated on a silicon wafer. Interestingly, only the silica biosensor surface was conjugated. Here, we hypothesize why this selective patterning occurred. Specifically, the silicon etchant (xenon difluoride), which is used in the fabrication of the biosensor, appears to reduce the efficiency of the silane coupling attachment to the underlying silicon wafer. These results will enable future researchers to more easily control the bioconjugation of their sensor surfaces, thus improving biosensor device performance.

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Atmospheric oxygen plasma activation of silicon (100) surfaces

Cited by 38 publications

References 35 publications

Large area efficient interface layer free monolithic perovskite/homo-junction-silicon tandem solar cell with over 20% efficiency

Large area efficient interface layer free monolithic perovskite/homo-junction-silicon tandem solar cell with over 20% efficiency

Aging mechanism of the native oxide on silicon (100) following atmospheric oxygen plasma cleaning

Selective patterning of Si-based biosensor surfaces using isotropic silicon etchants

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