Atmosphere effects in the processing of silicon carbide and silicon oxycarbide thin films and coatings

Colombo, Paolo; Paulson, Thomas E.; Pantano, Carlo G.

doi:10.1007/bf00486317

Cited by 35 publications

(20 citation statements)

References 7 publications

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“…1,3,4 The presence of higher amounts of TBOT develops a weak shoulder between 900-850 cm −1 attributed to the Si-C stretching vibration 13 membranes obtained at 1100 • C. This is due to the redistribution and mineralization reactions occurring during the hybrid-tooxycarbide material transformation. The low carbon content of the membranes arises from the difficulty to retain carbon in both thick and thin films, as it was showed by Colombo et al 14 but, according to the SiC x O y signals of the NMR spectra, most of this carbon can be found in the oxycarbide network.…”

Section: Characterization Of the Hybrid Films And Si-ti Oxycarbide Mementioning

confidence: 85%

Silicon–titanium oxycarbide glasses as bimodal porous inorganic membranes

Peña-Alonso¹,

Téllez²,

Tamayo³

et al. 2007

Journal of the European Ceramic Society

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Section: Characterization Of the Hybrid Films And Si-ti Oxycarbide Mementioning

confidence: 85%

Silicon–titanium oxycarbide glasses as bimodal porous inorganic membranes

Peña-Alonso¹,

Téllez²,

Tamayo³

et al. 2007

Journal of the European Ceramic Society

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“…A clear incorporation of oxygen into the surface up to a complete transformation into SiO 2 films can be detected. 11,13,16,18 In this work, we report on the influence of different coating and annealing parameters -especially the handling and pyrolysis atmosphere -on the film formation, the adhesion and the resulting composition of the coatings. A possible treatment in air could simplify the process, since the need of inert atmosphere is often a critical factor for applications of precursor systems.…”

Section: Introductionmentioning

confidence: 99%

“…6 An alternative, relatively low-cost and easy approach to these methods is the processing of polymeric and ceramiclike coatings by the well-known pyrolysis of appropriate organoelemental compounds (precursors). Coatings are mainly based on silicon containing precursors like polysiloxanes, 7-9 polycarbosilanes [10][11][12] or polysilazanes. [13][14][15][16][17][18] The resulting polymer-derived ceramics (PDCs) like silicon oxycarbide (SiCO), silicon carbide (SiC), silicon nitride (Si 3 N 4 ) or silicon carbonitride (SiCN) are promising materials for high temperature applications.…”

Section: Introductionmentioning

confidence: 99%

Advanced coatings on the basis of Si(C)N precursors for protection of steel against oxidation

Günthner

Kraus

Dierdorf

et al. 2009

Journal of the European Ceramic Society

150

106

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“…En la literatura pueden encontrarse trabajos donde se ha estudiado la formación de estos materiales con espesores normalmente pequeños, a la vez que se han llevado a cabo estudios de cómo influye la temperatura o el tipo de atmósfera en la formación de recubrimientos y films de carburo de silicio y oxicarburo de silicio (24). Otros estudios han analizado membranas de vidrios de oxicarburo de titanio con un espesor de 200 µm, y se ha visto cómo influye la porosidad en la difusividad en función del contenido en titanio (25).…”

Section: Sic X O 2(1-x) + Yc Libreunclassified

Influencia del tamaño del material híbrido en las características de los oxicarburos de silicio obtenidos

Mazo¹,

Palencia²,

Nistal³

et al. 2012

Bol. Soc. Esp. Ceram. Vidr.

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En este trabajo se ha investigado cómo influye el tamaño de los materiales híbridos del sistema TEOS/PDMS en las características de los vidrios de oxicarburo de silicio obtenidos. Los híbridos en piezas monolíticas (100 mm x 50 mm x 5 mm) fueron triturados (1 mm x 1 mm x 1 mm) o molidos en mortero de ágata o atrición hasta 16 µm o 3 µm, respectivamente. Posteriormente, se pirolizaron a 1100 ºC, obteniéndose los correspondientes vidrios de oxicarburo de silicio (SiOC). En estos SiOC se han encontrado diferencias en función del tamaño del material híbrido, diferencias que han sido estudiadas desde un punto de vista estructural y microestructural. La muestra monolítica presentó un mayor %C en red (34 %) y, a medida que se muele en mortero de ágata, disminuye hasta el 26 %. Sin embargo, para la muestra de atrición se obtiene valores similares a la monolítica (32 %). Esto concuerda con la presencia de la banda de FT-IR situada a 880 cm -1 atribuida a enlaces Si-C debidos a una mayor incorporación de carbono en la red. La fase de carbono libre en la muestra monolítica posee un dominio de 3.44 nm que aumenta hasta 3.66 nm en la de atrición. Este aumento del dominio corresponde al aumento de la grafitización. La morfología del SiOC monolítico corresponde a agregado de partículas esféricas con poros de 12 µm. Estos poros desaparecen en el SiOC de atrición, el cual está formado por partículas irregulares de 3 µm. Palabras clave: Híbrido, tamaño, pirolisis, oxicarburo de silicio, porosidadInfluence of the hybrid material size in silicon oxycarbide materials characteristics.In this work has been investigated the influence of the TEOS/PDMS hybrid size during the pyrolysis process to obtain the related silicon oxycarbide glasses. Hybrids monolithic pieces (100 mm x 50 mm x 5 mm), were crushed (1 mm x 1 mm x 1 mm) and grounded in agate or attrition to 16 and 3 μm, respectively. Then, they were pyrolyzed at 1100 ºC to obtain silicon oxycarbide glasses (SiOC). These materials present structural and microstructural differences. The monolithic sample showed the highest %C into the silica network (34 %), and after grounding in agate mortar decreased to 26 %. However the attrition milled sample reached %C values similar to the monolithic (32 %). This agrees with FT-IR band at 880 cm -1 assigned to Si-C bonds formation and related to higher carbon content into silica network. The carbon free phase displays a domain size of 3.44 nm which increased to 3.66 nm for the attrition milled. This result is due to a higher graphitization degree. The SiOC monolithic sample morphology displays spherical interconnected particles with pores of 12 mm. This morphology disappeared for the SiOC attrition milled sample, formed by irregular particles of 3 µm.

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Atmosphere effects in the processing of silicon carbide and silicon oxycarbide thin films and coatings

Cited by 35 publications

References 7 publications

Silicon–titanium oxycarbide glasses as bimodal porous inorganic membranes

Silicon–titanium oxycarbide glasses as bimodal porous inorganic membranes

Advanced coatings on the basis of Si(C)N precursors for protection of steel against oxidation

Influencia del tamaño del material híbrido en las características de los oxicarburos de silicio obtenidos

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