Assessment of surface profile data acquired by a stylus profilometer

Abstract

This paper analyzes the 2D and 3D distortion effects of a measured profile caused by the stylus tip radius of a stylus-type surface profilometer. On the basis of our analysis results, we propose the selection criteria for the stylus tip radius to improve the reliability of measurement results. For that purpose, a simulation algorithm has been devised and implemented for 2D and 3D measurement simulations, and the 3D surface texture used in simulation was obtained using an atomic force microscope from an actual machined surface to improve the reliability of simulation results. The simulation results were compared with the measured results from the same specimen using a roughness tester, and the validity of analysis via the simulation proposed in this study was confirmed. Cumulative power spectral analysis was performed for the 2D and 3D simulated profiles obtained from simulation. On the basis of the analysis results, an effective frequency component field was clarified using a stylus-type profilometer, and the selection criteria of the stylus tip radius for measurement were proposed considering the surface texture characteristics of the specimen.

Calibration and verification of areal surface texture measuring instruments

“…For stylus instruments this issue has been addressed by studying surface probe interaction [6,121,129,140,158,176,191,195,196,202]. However, for optical instruments, the interaction of the incident light with the surface needs further research (see Section 9) [118].…”

Stylus Profilometry in Surface Roughness Measurements of the Vertical Conical Mixing Unit Used in a Food Industry

“…Stylus profilometry turned out to be a major breakthrough that implied the development of the mechanical measurement methods for years to come. The principle of measuring by stylus profile-meter remains unchanged for many years and consists in measuring the profile of the examined surface with a conical-shaped blade with a small radius of rounding the tip (2, 2.5, 5 and 10 μm) 14,15 that moves along the surface to be measured. The acquired measurement signal, after the propered gain, was sent to the computer where it could be processed in such a way that the values of the selected parameters and functions of surface roughness were obtained [7][8][9] .…”

Effects of laser ablation coating removal (LACR) on a steel substrate: Part 1: Surface profile, microstructure, hardness, and adhesion

“…The stylus based roughness measurement tends to "soften" the profile of the peaks and "sharpen" the profile of the valleys relative to the actual surface due to the finite radius of the tip. In order to minimize this systematic error, a simple profile correction method was employed, where profilometry data was corrected using the information about the position of the measured point and a rounded shape of probe with a finite radius of 7 μm (verified by optical microscopy measurement) [18]. The system records the position of the stylus tip as it contacts the sample surface.…”