1996
DOI: 10.1063/1.116416
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Assessment of nondiamond carbon levels present in chemical vapor deposited diamond by analysis of the plasmon loss features of x-ray photoelectron spectra

Abstract: The plasmon loss region of x-ray photoelectron spectra has been analyzed for chemically vapor deposition diamond in order to assess the nondiamond carbon (NDC) levels present. A semiquantitative method for expressing the quality of the diamond, based upon the ratio of the diamond bulk plasmon to the main carbon 1s line is presented and a figure of merit defined. A comparison with Raman spectroscopy shows that this technique compares well in terms of range and sensitivity to NDC levels.

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Cited by 10 publications
(8 citation statements)
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“…Haq et al proposed a figure of merit ͑FOM͒ from the XPS data which is the ratio of the integrated peak areas of the C 1s peak to the diamond bulk plasmon peak. 14 The higher the FOM, the worse the diamond quality. Figure 5 shows the FOM of the six samples as a function of sample color.…”
Section: Xps Resultsmentioning
confidence: 99%
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“…Haq et al proposed a figure of merit ͑FOM͒ from the XPS data which is the ratio of the integrated peak areas of the C 1s peak to the diamond bulk plasmon peak. 14 The higher the FOM, the worse the diamond quality. Figure 5 shows the FOM of the six samples as a function of sample color.…”
Section: Xps Resultsmentioning
confidence: 99%
“…14 The C 1s binding energies for pure carbon phases are only slightly affected by the hybridization of the atoms, making it very difficult to differentiate diamond/ nondiamond content in CVD diamond films by looking at the C 1s peak. 15 Moreover, surface contamination and charging effects cause additional problems.…”
Section: Introductionmentioning
confidence: 99%
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“…Energy loss spectroscopy of photoelectrons emitted from the C1s core level has been used previously either for investigations of the role of surface hydrogen and oxygen atom coverage [11,12] as well as for the study of seeding and growth of nano-and microcrystalline diamond films [16][17][18][19]. For the assessment of the non diamond residual phase, the ratio of the bulk ( + ) plasmon loss of the diamond phase to the main C1s line (characteristic of the near-surface over typically 5 nm) was tentatively correlated to the ratio of G and D lines in Raman spectra (characteristic of a bulk depth >100 nm) [17].…”
Section: Introductionmentioning
confidence: 99%
“…For the assessment of the non diamond residual phase, the ratio of the bulk ( + ) plasmon loss of the diamond phase to the main C1s line (characteristic of the near-surface over typically 5 nm) was tentatively correlated to the ratio of G and D lines in Raman spectra (characteristic of a bulk depth >100 nm) [17].…”
Section: Introductionmentioning
confidence: 99%