Assessing boron quantification and depth profiling of different boride materials using ion beams

Pitthan, E.; Moro, Marcos V.; Corrêa, Silma Alberton; Primetzhofer, Daniel

doi:10.1016/j.surfcoat.2021.127188

Cited by 19 publications

(3 citation statements)

References 39 publications

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“…ToF-energy coincidence spectra were transformed into depth profiles using the POTKU code. 16 As a complement, and to compensate effects of multiple scattering caused by the Au-backing of the film of interest, which are deteriorating the depth profile 17 , we performed additional elastic backscattering spectrometry experiments. Specifically, we employed 6 MeV He + primary ions incident under 5° off the surface normal using the same accelerator system.…”

Section: Methodsmentioning

confidence: 99%

Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons

Niiranen

Nadhom

Zanáška

et al. 2022

Preprint

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In a recently presented chemical vapor deposition (CVD) method, plasma electrons are used as reducing agents for deposition of metals. The plasma electrons are attracted to the substrate surface by a positive substrate bias. Here, we present how a standard quartz crystal microbalance (QCM) system can be modified to allow applying a DC bias to the QCM sensor to attract plasma electrons to it and thereby also enable in situ growth monitoring during the electron-assisted CVD method. We show initial results from mass gain evolution over time during deposition of iron films using the biased QCM and how the biased QCM can be used for process development and provide insight to the surface chemistry by time-resolving the CVD method. Post deposition analyzes of the QCM crystals by cross-section electron microscopy and high-resolution X-ray photoelectron spectroscopy, show that the QCM crystals are coated by an iron-containing film and thus function as substrates in the CVD process. A comparison of the areal mass density given by the QCM crystal and the areal mass density from elastic recoil detection analysis and Rutherford backscattering spectrometry was done to verify the function of the QCM setup. Time-resolved CVD experiments show that this biased QCM method holds great promise as one of the tools for understanding the surface chemistry of the newly developed CVD method.

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Section: Methodsmentioning

confidence: 99%

Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons

Niiranen

Nadhom

Zanáška

et al. 2022

Preprint

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show abstract

“…Ion beam analysis techniques offer precise, least-destructive depth profiling with the proton Nuclear Reaction Analysis (p-NRA) technique based on the reaction 𝐵 ! "" (𝑝, 𝑎 # ) 𝐵𝑒 $ % along with the proton Elastic Backscattering Spectroscopy (p-EBS) mainly being proposed to cover applications in a wide energy range ( [2], [3]). Deuterons, however, offer greater mass resolution compared to protons, with similar stopping power values and the ability to simultaneously excite most light isotopes, if the need arises.…”

Section: Introductionmentioning

confidence: 99%

Study of the Elastic Scattering in the d + 11B system for EBS purposes

Tsakiris

Kokkoris

Maragkos

et al. 2022

hnps

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The implementation of boron in several fields, such as in the creation of p-type semiconductors in electronics, has created the need for the accurate quantitative determination of its depth profile concentrations in near surface layers of various matrices. In the framework of IBA techniques a combination of Elastic Backscattering Spectroscopy, along with Nuclear Reaction Analysis, has been proposed in order to address the current needs for boron depth profiling, focusing on the use of proton beams. Deuteron beams however offer superior mass resolution with similar stopping power values and simultaneous excitation of most light elements. Unfortunately, the lack of experimental datasets concerning the deuteron elastic scattering on boron impedes their use. Thus, in the present work, the first set of measurements for the 11B(d,d0) differential cross section covering the Ed,lab=1300-1860 keV energy range for the backscattering angles of 150ο, 160ο and 170ο were carried out. The study was conducted at the 5.5 MV Tandem Accelerator of the Institute of Nuclear and Particle Physics, in the National Center of Scientific Research “Demokritos”, Athens, Greece. The target was a thin, self-supporting aluminum foil, upon which a thin natB (isotopic ratio: 11B 80.1%, 10B 19.9%) layer was deposited using the sputtering technique at RBI, Zagreb, Croatia, followed by the evaporation of an ultra-thin layer of 197Au on top for normalization and wear protection purposes. The outgoing particles were detected using silicon surface barrier (S.S.B.) detectors and the differential cross sections for elastic scattering were determined from the resulting spectra via the relative technique

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“…Ion beam analysis techniques offer least-destructive, precise boron depth profiling -with proton beams being usually implemented. In particular, the proton Nuclear Reaction Analysis (p-NRA) applications over a wide energy range ( [3], [4]). However, the deuteron beam offers a greater mass resolution compared to the proton one, with relatively similar stopping power values, while also being able to simultaneously excite most of the light isotopes in a single measurement, if the need arises.…”

mentioning

confidence: 99%

Differential Cross-section Measurements for Deuteron Elastic Scattering on ¹¹B

Tsakiris

Cosic²,

Dimitrakopoulos³

et al. 2022

J. Phys.: Conf. Ser.

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The implementation of boron in several fields, such as in the creation of p-type semiconductors in electronics, has created the need for the accurate quantitative determination of its depth profile concentrations in near surface layers of various matrices. In the framework of IBA techniques, a combination of Elastic Backscattering Spectroscopy (EBS), along with Nuclear Reaction Analysis (NRA), has been proposed in order to address the current needs for boron depth profiling, based on the use of a proton beam. Deuterons offer superior mass resolution with respect to protons, having similar stopping power values, but, unfortunately, the lack of experimental datasets concerning the deuteron elastic scattering on boron impedes their use. Thus, in the present work, the first set of measurements for the 11B(d,d0) differential cross sections covering the Ed,lab=1300-1860 keV energy range for the backscattering angles of 150°, 160° and 170° was carried out. The study was conducted at the 5.5 MV Tandem Accelerator of the Institute of Nuclear and Particle Physics, in the National Center of Scientific Research “Demokritos”, Athens, Greece. The target was a thin, self-supporting aluminum foil, upon which a thin natB (isotopic ratio: 11B 80.1%, 10B 19.9%) layer was deposited using the sputtering technique at RBI, Zagreb, Croatia, followed by the evaporation of an ultra-thin layer of 197Au on top for wear protection and normalization purposes. The outgoing particles were detected using 6 Silicon Surface Barrier (S.S.B.) detectors and the differential cross sections for the elastic scattering were determined from the resulting spectra via the relative measurement technique.

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Assessing boron quantification and depth profiling of different boride materials using ion beams

Cited by 19 publications

References 39 publications

Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons

Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons

Study of the Elastic Scattering in the d + 11B system for EBS purposes

Differential Cross-section Measurements for Deuteron Elastic Scattering on ¹¹B

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Assessing boron quantification and depth profiling of different boride materials using ion beams

Cited by 19 publications

References 39 publications

Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons

Biased quartz crystal microbalance method for studies of CVD surface chemistry induced by plasma electrons

Study of the Elastic Scattering in the d + 11B system for EBS purposes

Differential Cross-section Measurements for Deuteron Elastic Scattering on 11B

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Differential Cross-section Measurements for Deuteron Elastic Scattering on ¹¹B