Artificial eyelid for protection of optical sensors

Goodwin-Johansson, Scott H.; Holloway, Paul H.; McGuire, G. E.; Buckley, Leonard J.; Cozzens, Robert F.; Schwartz, Robert W.

doi:10.1117/12.387781

Cited by 13 publications

(7 citation statements)

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“…[9] Compared to elemental oxides, such as NiO and Co 3 O 4 , NiCoO x is a promising candidate for applications such as electrocatalytic anodic oxygen evolution, supercapacitors, sensors, optical limiters, and switches. [9][10][11][12] Similarly, in recent studies, [13,14] Femodified NiO compounds have been demonstrated to be efficient OER catalysts. Boettcher's group [13] found that Fe enhances the film conductivity of nickel-based oxides, and claimed that incorporating Fe enhances the OER activity through a NiFe partial charge-transfer activation process, as has been proposed by Corrigan et al [15] Furthermore, this study also reported that the overpotential of a Ni(OH) 2 film for the OER can be reduced during cyclic voltammetry (CV) in 1 m KOH, owing to the incorporation of trace amounts of Fe in KOH.…”

Section: Introductionmentioning

confidence: 88%

Back‐Illuminated Si‐Based Photoanode with Nickel Cobalt Oxide Catalytic Protection Layer

et al. 2016

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What is the most significant result of this study? Aco-sputtered NiCoO X film coupled to Si was used as aprotec-tive catalyst for the water oxidation reactioni n1m KOH, and it showedacathodic shift of the onset voltage (> 50 mV) that is likely caused by incorporation of Fe from the KOH electrolyte. Once the activity of the sample is stabilized, no furtherd egra-dation is observed over the following6days, indicating that the demonstrated back-illuminated photoanode configuration can be considered ap romising strategy for the bottom cell of at andem water-splitting device under alkaline conditions. What prompted you to investigate this topic/problem?

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Section: Introductionmentioning

confidence: 88%

Back‐Illuminated Si‐Based Photoanode with Nickel Cobalt Oxide Catalytic Protection Layer

et al. 2016

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“…Specific details on the fabrication of these actuators have been reported previously. 11,12 The artificial eyelid actuator shown in Figure 1 consists of two layers of polyimide surrounding a gold flexible electrode which are deposited and patterned on a glass substrate with a sacrificial release layer. The release layer is etched away allowing the film to curl away from the substrate.…”

Section: Actuator Fabricationmentioning

confidence: 99%

Chopping of near- and mid-infrared radiation using a curled electrostatic MEMS actuator

Dausch

Goodwin

2003

SPIE Proceedings

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An electrostatic MEMS actuator known as the "Artificial Eyelid" can be used as a micromechanical chopper for IR detectors. The actuator structure consists of a curled polymer/metal film stack which is microfabricated and released from an IR transparent substrate. The film stack is uncurled by applying an electric field between the curled film and the transparent fixed electrode on the substrate. These flexible film actuators can act as IR choppers, providing transmission of radiation to the sensor elements when open (curled) and reflection when closed (uncurled). Arrays of actuators were fabricated on ITOcoated glass substrates and ranged in size from 4 x 4 mm to 7.5 x 15 mm with individual elements ranging from 250 to 500 µm on a side. Actuation for devices with average radius of curvature of 120 µm was consistently achieved at 150-170 V operation with 98-100% of the elements functioning and long lifetimes. IR chopper characteristics were measured using a blackbody source and pyroelectric detector by applying sine and square wave voltage to the actuators at a frequency of 30 Hz. The capability of the artificial eyelid for chopping near-and mid-IR radiation, including future fabrication of devices using NiCo 2 O 4 or NiRh 2 O 4 films for IR transparent electrodes, will be discussed.

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“…The fabrication of the electrostatic, flexible film uses processes and materials originally developed for the fabrication of VLSI integrated circuits [5]. The creation of the artificial eyelid places some additional constraints on the design and fabrication of the device.…”

Section: Fabrication Of the Artificial Eyelidmentioning

confidence: 99%

High-contrast artificial eyelid for protection of optical sensors

et al. 2001

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The fabrication, testing and performance of a new device for the protection of optical sensors will be described. The device consists of a transparent substrate, a transparent conducting electrode, insulating polymers, and a reflective top electrode layer. Using standard integrated circuit fabrication techniques, arrays of apertures can be created with sizes ranging from micrometers to millimeters. A stress gradient resulting from different thermal coefficients of expansion between the top polymer layer and the reflective metal electrode, rolls back the composite thin film structure from the aperture area once a release layer is chemically etched away, forming a tightly curled film at one side of the aperture -the "open" condition. The application of a voltage between the transparent conducting and reflective metal electrodes creates an electrostatic force which unrolls the curled film, closing the artificial eyelid. Fabricated devices have been completed on glass substrates with indium tin oxide electrodes. The curled films have diameters of less than 100µm with the arrays having mechanical transparencies of over 80%. Greater transparencies are possible with optimized designs. The electrical and optical results from the testing of the artificial eyelid will be discussed including the optimization of the design and fabrication for applications in systems that extend into the IR spectrum. A primary area of investigation is the choice of the transparent conducting electrode.

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Artificial eyelid for protection of optical sensors

Cited by 13 publications

References 0 publications

Back‐Illuminated Si‐Based Photoanode with Nickel Cobalt Oxide Catalytic Protection Layer

Back‐Illuminated Si‐Based Photoanode with Nickel Cobalt Oxide Catalytic Protection Layer

Chopping of near- and mid-infrared radiation using a curled electrostatic MEMS actuator

High-contrast artificial eyelid for protection of optical sensors

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