Arsine Adsorption on Activated Carbon

Haacke, G.; Brinen, J. S.; Burkhard, H.

doi:10.1149/1.2095729

Cited by 32 publications

(27 citation statements)

References 3 publications

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“…However, this study was conducted only for removing SiH 4 in the exhaust gas. The optimum composition of metal oxides for treating other toxic hydrides, such as AsH 3 and pH 3 , and SiH 4 in the presence of other hydrides is worth investigating, and the study will be conducted in the future.…”

Section: Discussionmentioning

confidence: 99%

“…Some researchers studied the adsorption of toxic hydride gases, such as AsH 3 and pH 3 . Haacke et al 3 found that activated carbon impregnated with copper and chromium is an effective medium to remove AsH 3 from the effluent gas. They also showed that AsH 3 was oxidized to As 0 , whereas metal Cu 2ϩ , coated on the activated carbon surface, was reduced to Cu 0 .…”

Section: Introductionmentioning

confidence: 99%

“…Subsequently, As 0 and Cu 0 were further oxidized to As ϩ3 and Cu 2ϩ when the adsorbent was exposed to air. Colabella et al 4 indicated that pH 3 adsorbed on the activated carbon would be oxidized to form P 2 O 5 or P 2 O 3 by introducing oxygen into the test system. Hardwick and Mailloux 5 treated AsH 3 by using the Novapure S510 adsorbent (Novapure Corp.), which also contained copper.…”

Section: Introductionmentioning

confidence: 99%

“…Based on the literature, it is known that copper oxide is commonly used as the active species for removing hydride gases. However, adsorbents using activated carbon as the support, as shown in the literature, 3,4 are not safe for treating exhaust gases in the fab or sub-fab of the semiconductor industry because of their flammability. 6 Adsorbents of nonflammable support materials (e.g., metal oxides) are important, and the parameters influencing the adsorption capacity are also worth investigating.…”

Section: Introductionmentioning

confidence: 99%

“…3,4 The following reactions are proposed to take place during SiH 4 adsorption by CuO-ZnO/Al 2 O 3 :…”

mentioning

confidence: 99%

See 4 more Smart Citations

Silane Removal at Ambient Temperature by Using Alumina-Supported Metal Oxide Adsorbents

Hsu

Tsai

Chiang

et al. 2007

Journal of the Air & Waste Management Association

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Copper, zinc, and cerium oxide adsorbents supported on alumina were used to remove silane gas (SiH 4 ). The adsorbents were prepared using a coprecipitation method and characterized by the inductively coupled plasma mass spectrometry, X-ray powder diffractometer, and Brunauer-Emmett-Teller method (BET). The silane removal efficiency and adsorption capacity of the adsorbents were investigated in this study. Test results showed that the adsorbents containing active species had a removal efficiency Ͼ99.9% for SiH 4 before breakthrough. Adsorbents containing mixed oxides (CuO-CeO 2 / Al 2 O 3 and CuO-ZnO/Al 2 O 3 ), which showed well-dispersed active species and high BET surface areas, had a greater adsorption capacity than the adsorbents containing single metal oxide. However, when the CuO-ZnO/ Al 2 O 3 adsorbents contain Ͼ40 wt% of active metal oxides, the increase of active species lowered the BET surface area leading to a decrease of the adsorption capacity. Additionally, when the content of the active metal oxides was between 20% and 40%, the CuO-ZnO/Al 2 O 3 adsorbents demonstrated higher adsorption capacity.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…3,4 The following reactions are proposed to take place during SiH 4 adsorption by CuO-ZnO/Al 2 O 3 :…”

mentioning

confidence: 99%

See 3 more Smart Citations

Silane Removal at Ambient Temperature by Using Alumina-Supported Metal Oxide Adsorbents

Hsu

Tsai

Chiang

et al. 2007

Journal of the Air & Waste Management Association

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Electrochemical method for wet removal of phosphine

Zhang

Lin

et al. 2015

Env Prog and Sustain Energy

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The removal of phosphine (PH3) was studied with an electrochemical approach using a Ti/SnO2 anode. The effects of the current density, O2 content, gas flow rate, temperature, and type of electrolyte on the PH3 removal were investigated. The liquid phase reaction products were detected by ion chromatography. It was observed that PH3 was effectively removed in the electrochemical reactor and phosphate (PO43−) existed in solution after reaction. Increasing current density, oxygen content and reaction temperature can enhance the removal of PH3. 0ver 85% PH3 was removed with an operation condition of current density of 53.05 mA/dm2, 65°C, 4.6 vol % O2 and gas flow rate of 200 mL/min in 0.1 mol/L Na2SO4 aqueous solution. Chosen Na2SO4 as electrolyte, removal efficiency remained stability and it would be conducive to the recovery of phosphate (PO43‐). The gas flow rate influence is remarkably clear in the reactor where it was evident that the most efficient gas flow rate toward a 90% PH3 removal was reached at 50 mL/min. Electrochemical oxidation will be a potential method for the PH3 removal because of its low cost, long duration removal efficiency and the valuable hydrogen byproduct produced. © 2015 American Institute of Chemical Engineers Environ Prog, 34: 1640–1646, 2015

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Control of particulate and gas emissions in photovoltaic module manufacture

Fthenakis

Moskowitz

1994

Progress in Photovoltaics

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Emissions of toxic gases and particulates from photovoltaic module R&D and manufacturing facilities may need treatment to meet current or anticipated regulations. In this study currently available pollution‐control options (e.g. filters, scrubbers, adsorption columns, combustion devices) are reviewed for their suitability to treat emissions (e.g. HCl, HF, Cl2, H2Se, SiH2, SiH2Cl2, AsH3, PH3, Cd and As compounds) from photovoltaic cell laboratories and production facilities. For small emission flow rates (e.g. > 100 l min−−1) and small to moderate particulate loads (e.g. <2 mg l−−1), on‐line filters can economically collect fumes and other particulates generated in the deposition chambers, whereas adsorption columns can very effectively treat toxic hydrates (e.g. AsH3, PH3, H2Se) at concentrations up to 1% (up to 10% for very small flow rates, e.g. <11 min−−1). For large emission flow rates, (e.g. > 100 1 min−−1), very low concentrations of hydrates can still be treated effectively with adsorption. Combined control of particulates and hydrates can be achieved by a bag‐house followed by a multistage scrubber; when the concentration of hydrates is relatively high, a thermal oxidation unit should precede the bag‐house scrubber for effective control. Finally, multicomponent mixtures can be treated either by wet scrubbing or combustion, depending on the mixture composition.

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Arsine Adsorption on Activated Carbon

Cited by 32 publications

References 3 publications

Silane Removal at Ambient Temperature by Using Alumina-Supported Metal Oxide Adsorbents

Silane Removal at Ambient Temperature by Using Alumina-Supported Metal Oxide Adsorbents

Electrochemical method for wet removal of phosphine

Control of particulate and gas emissions in photovoltaic module manufacture

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