Arrays of open, independently tunable microcavities

Derntl, Christian G.; Schneider, Michael; Schalko, J.; Bittner, A.; Schmiedmayer, Jörg; Schmid, U.; Trupke, Michael

doi:10.1364/oe.22.022111

Cited by 26 publications

(38 citation statements)

References 45 publications

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“…In the following, we briefly summarize micro-machining approaches that have been used to fabricate hybrid-integrated cavities, with some emphasis on recent efforts aimed at the eventual monolithic integration of mirrors and cavities with other functional devices. [73], (b) a laser machined fiber end [12], (c) array of concave features made by FIB milling [11], (d) two silicon micro-mirrors fabricated by dry etching [74], (e) array of cantilever based micro-mirrors [75], (f) and a waveguide connected buckled-dome microcavity [16].…”

Section: Chip-based Fpcs For Cqedmentioning

confidence: 99%

On-chip High-finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information

Bitarafan¹,

DeCorby²

2017

Preprint

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For applications in sensing and cavity-based quantum computing and metrology, openaccess Fabry-Perot cavities -with an air or vacuum gap between a pair of high reflectance mirrors -offer important advantages compared to other types of microcavities. For example, they are inherently tunable using MEMS-based actuation strategies, and they enable atomic emitters or target analytes to be located at high field regions of the optical mode. Integration of curved-mirror Fabry-Perot cavities on chips containing electronic, optoelectronic, and optomechanical elements is a topic of emerging importance. Micro-fabrication techniques can be used to create mirrors with small radius-of-curvature, which is a prerequisite for cavities to support stable, small-volume modes. We review recent progress towards chip-based implementation of such cavities, and highlight their potential to address applications in sensing and cavity quantum electrodynamics.

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Section: Chip-based Fpcs For Cqedmentioning

confidence: 99%

On-chip High-finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information

Bitarafan¹,

DeCorby²

2017

Preprint

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“…These microcavities have been used in a number of precision measurement applications, including cavity quantum electrodynamics [3,4,8], quantum information [5], atom trapping [1], and displacement sensing for microcantilevers [8]. The hemispherical microcavities reported to date can generally be divided into two approaches.…”

Section: Introductionmentioning

confidence: 99%

“…The other mirror can be an optical fiber or any other type of mirror. The second approach is to microfabricate a concave micromirror in a flat substrate, such as silicon [1,2,5,7,8] or glass [6]. While both approaches have advantages, the latter is of particular interest for optomechanical sensors because the wafer-scale fabrication processes facilitate direct integration with microelectromechanical systems and nanophotonics.…”

Section: Introductionmentioning

confidence: 99%

“…Silicon concave micromirrors with adequate surface shape and quality have been fabricated by several groups [1,2,5,7,8] and have been used to demonstrate microscale hemispherical cavities with a finesse of up to 64,000 [5]. In this paper, we explore the optimization of the geometric parameters of concave micromirrors to achieve stable silicon hemispherical microcavities for sensing applications.…”

Section: Introductionmentioning

confidence: 99%

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Concave silicon micromirrors for stable hemispherical optical microcavities

2017

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A detailed study of the fabrication of silicon concave micromirrors for hemispherical microcavities is presented that includes fabrication yield, surface quality, surface roughness, cavity depth, radius of curvature, and the aspect ratio between the cavity depth and radius of curvature. Most importantly, it is shown that much larger cavity depths are possible than previously reported while achieving desirable aspect ratios and nanometer-level roughness. This should result in greater frequency stability and improved insensitivity to fabrication variations for the mode coupling optics. Spectral results for an assembled hemispherical microcavity are presented, demonstrating that high finesse and quality factor are achieved with these micromirrors, F = 1524 and Q = 3.78 × 105, respectively.

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“…By heating the chip of microcavities, thermal expansion increases the cavity length sufficiently to align the optical resonance with the desired 87 Rb transition at 308 K. The cavity wavelength could then, in principal, be locked to an atomic transition. One drawback of the current method of tuning is the inability to tune individual cavities, however integrating heater electrodes [47] or electrostatic actuation [31] would allow for individually addressable on-chip microcavities.…”

mentioning

confidence: 99%

Tunable open-access microcavities for on-chip cavity quantum electrodynamics

Potts

Melnyk

Ramp

et al. 2016

Applied Physics Letters

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We report on the development of on-chip microcavities and show their potential as a platform for cavity quantum electrodynamics experiments. Microcavity arrays were formed by the controlled buckling of SiO2/Ta2O5 Bragg mirrors, and exhibit a reflectance-limited finesse of 3500 and mode volumes as small as 35λ3 . We show that the cavity resonance can be thermally tuned into alignment with the D2 transition of 87 Rb, and outline two methods for providing atom access to the cavity. Owing to their small mode volume and high finesse, these cavities exhibit single-atom cooperativities as high as C1 = 65. A unique feature of the buckled-dome architecture is that the strong-coupling parameter g0/κ is nearly independent of the cavity size. Furthermore, strong coupling should be achievable with only modest improvements in mirror reflectance, suggesting that these monolithic devices could provide a robust and scalable solution to the engineering of light-matter interfaces.The implementation of a distributed quantum network could enable a global quantum communication system, [1,2] operations, [7,28] and to implement an elementary quantum network.[29] These works place single-atom quantum systems as a leading candidate for use in large-scale quantum networks. As a result, there is a strong interest in the integration of alkali atoms into robust, scalable, packaged optical cavities. [30,31] Furthermore, it is desirable for these optical cavities to have small mode volumes and be tunable to atomic transitions. [32][33][34] Here we report the development of 'buckled-dome' Fabry-Pérot microcavities designed for cQED applications, specifically on-chip coupling between single photons and single rubidium atoms. These cavities produce high single-atom cooperativities, can be easily tuned to atomic transitions, and can facilitate open-access for incorporation of atoms.The buckled-dome microcavities were fabricated via a monolithic self-assembly procedure. [35,36] First, a distributed Bragg reflector (10.5 periods SiO 2 /Ta 2 O 5 , starting and ending with Ta 2 O 5 ) was deposited on a fused silica substrate by reactive magnetron sputtering. Microcavities were defined by the lithographic patterning of a thin (∼15 nm) low-adhesion fluorocarbon layer, followed by the deposition of a second Bragg reflector identical to the initial reflector. Films with low loss and high compressive stress (∼200 MPa) were realized by using high target power (200 W), elevated substrate temperature (150• C), and low chamber pressure (4 mTorr).[37] Optical constants for single films were measured usarXiv:1601.03344v1 [cond-mat.mes-hall]

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Arrays of open, independently tunable microcavities

Cited by 26 publications

References 45 publications

On-chip High-finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information

On-chip High-finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information

Concave silicon micromirrors for stable hemispherical optical microcavities

Tunable open-access microcavities for on-chip cavity quantum electrodynamics

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