Argon plasma inductively coupled plasma reactive ion etching study for smooth sidewall thin film lithium niobate waveguide application

Ulliac, Gwenn; Calero, Venancio; Ndao, Abdoulaye; Baida, Fadi; Bernal, Maria–Pilar

doi:10.1016/j.optmat.2015.12.040

Cited by 81 publications

(42 citation statements)

References 18 publications

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“…The most critical step of this fabrication sequence is the RIE process. Different gases and parameters have been investigated to dry etch lithium niobate . One of the main issues, when etching lithium niobate with fluoride based gases is the formation of crystalline lithium fluoride (LiF) particles at the surface, causing a rough lithium niobate surface unsuitable for optical applications.…”

Section: Photonic Building Blocks In Lnoimentioning

confidence: 99%

“…The formation of LiF can be reduced by choosing appropriate etching parameters or exchanging the lithium with hydrogen ions by a proton exchange process . The LiF formation can be eliminated by avoiding the use of fluoride based etching gases, such as when using only physical etching by argon milling . This process is very promising as it was successfully used to achieve wire waveguides with losses as low as 3 dB/cm and bending radii <20 μm for telecommunication C‐band wavelengths.…”

Section: Photonic Building Blocks In Lnoimentioning

confidence: 99%

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Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

Boes

Corcoran

Chang

et al. 2018

Laser & Photonics Reviews

509

290

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Lithium niobate on insulator (LNOI) technology is revolutionizing the lithium niobate industry, enabling higher performance, lower cost and entirely new devices and applications. The availability of LNOI wafers has sparked significant interest in the platform for integrated optical applications, as LNOI offers the attractive material properties of lithium niobate, while also offering the stronger optical confinement and a high optical element integration density that has driven the success of more mature silicon and silicon nitride (SiN) photonics platforms. Due to some similarities between LNOI and SiN, established techniques and standards can readily be adapted to the LNOI platform including a significant array of interface approaches, device designs and also heterogeneous integration techniques for laser sources and photodetectors. In this contribution, we review the latest developments in this platform, examine where further development is necessary to achieve more functionalities in LNOI integrated optical circuits and make a few suggestions of interesting applications that could be realized in this platform.

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Section: Photonic Building Blocks In Lnoimentioning

confidence: 99%

Section: Photonic Building Blocks In Lnoimentioning

confidence: 99%

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

Boes

Corcoran

Chang

et al. 2018

Laser & Photonics Reviews

509

290

View full text Add to dashboard Cite

show abstract

“…The shape of the cross-section of the waveguide is trapezoidal, which is inevitable due to redeposition of lithium niobate in the dry etching process. 34 Our waveguide has a side wall angle of 73.5° on both sides. Figure 1(b) shows effective refractive indices of three modes for vertically polarized 1550-nm light as a function of waveguide-top width.…”

Section: Device Design and Fabricationmentioning

confidence: 99%

Continuous-wave 6-dB-squeezed light with 2.5-THz-bandwidth from single-mode PPLN waveguide

et al. 2020

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Terahertz (THz)-bandwidth continuous-wave (CW) squeezed light is essential for integrating quantum processors with time-domain multiplexing (TDM) by using optical delay line interferometers. Here, we utilize a single-pass optical parametric amplifier (OPA) based on a single-spatial-mode periodically poled ZnO:LiNbO3 waveguide, which is directly bonded onto a LiTaO3 substrate. The single-pass OPA allows THz bandwidth, and the absence of higher-order spatial modes in the single-spatial-mode structure helps to avoid degradation of squeezing. In addition, the directly bonded ZnO-doped waveguide has durability for highpower pump and shows small photorefractive damage. Using this waveguide, we observe CW 6.3-dB squeezing at 20-MHz sideband by balanced homodyne detection. This is the first realization of CW squeezing with a single-pass OPA at a level exceeding 4.5 dB, which is required for the generation of a two-dimensional cluster state. Furthermore, the squeezed light shows 2.5-THz spectral bandwidth. The squeezed light will lead to the development of a high-speed on-chip quantum processor using TDM with a centimeter-order optical delay line.

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“…12 However, LN nanostructures are difficult to fabricate with low loss, due to its inert chemical properties and physical hardness. 15,16 Due to those difficulties, research interests in the pursuit of second-order nonlinear nanophotonics have shifted to other materials that are easier to integrate, such as AlN,17 GaAs, 18 InP, 19 and BaTio3. 20 However, the success has been limited as none of those materials could match the excellent optical properties of LN.…”

Section: Introductionmentioning

confidence: 99%

Modal phase matched lithium niobate nanocircuits for integrated nonlinear photonics

et al. 2018

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High complexity, dense integrated nanophotonic circuits possessing strong nonlinearities are desirable for a breadth of applications in classical and quantum optics. In this work, we study natural phase matching via modal engineering in lithium niobate (LN) waveguides and microring resonators on chip for second harmonic generation (SHG). By carefully engineering the geometry dispersion, we observe a 26% W −1 cm −2 normalized efficiency for SHG in a waveguide with submicron transverse mode confinement. With similar cross-sectional dimensions, we demonstrate phase matched SHG in a microring resonator with 10 times enhancement on the out-coupled secondharmonic power. Our platform is capable of harnessing the strongest optical nonlinear and electro-optic effects in LN on chip with unrestricted planar circuit layouts. It offers opportunities for dense and scalable integration of efficient photonic devices with low loss and high nonlinearity.

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Argon plasma inductively coupled plasma reactive ion etching study for smooth sidewall thin film lithium niobate waveguide application

Cited by 81 publications

References 18 publications

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

Status and Potential of Lithium Niobate on Insulator (LNOI) for Photonic Integrated Circuits

Continuous-wave 6-dB-squeezed light with 2.5-THz-bandwidth from single-mode PPLN waveguide

Modal phase matched lithium niobate nanocircuits for integrated nonlinear photonics

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