2008
DOI: 10.1016/j.apsusc.2008.07.033
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Area-selective epitaxy of GaAs by migration-enhanced epitaxy with As2 and As4 arsenic sources

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Cited by 4 publications
(1 citation statement)
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“…The ratio of growth rates on different GaAs facets was shown to be sensitive to the As pressure [16] and to the type of As species [17]. On (0 0 1) surfaces, it was found that the Ga diffusion length is lower under As 2 than under As 4 [18].…”
Section: Resultsmentioning
confidence: 98%
“…The ratio of growth rates on different GaAs facets was shown to be sensitive to the As pressure [16] and to the type of As species [17]. On (0 0 1) surfaces, it was found that the Ga diffusion length is lower under As 2 than under As 4 [18].…”
Section: Resultsmentioning
confidence: 98%