Approaching Gas Phase Electrodeposition: Process and Optimization to Enable the Self‐Aligned Growth of 3D Nanobridge‐Based Interconnects

Fang, Jun; Schlag, Leslie; Park, Se-Chul; Stauden, Thomas; Pezoldt, Jörg; Schaaf, Peter; Jacobs, Heiko O.

doi:10.1002/adma.201503039

Cited by 18 publications

(26 citation statements)

References 24 publications

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“…In a number of works, an eroded material from the electrodes in an APP system is deposited as a nanomaterial product, but most often only the influence of the flow rate is demonstrated . As stated before, 0.5–1.5 mm gaps or even capillary‐sized tubes are commonly used in the discharge design, while the analysis systems are often installed downstream the reactor.…”

Section: Discussionmentioning

confidence: 99%

“…The power input is considered the main variable that determines the efficiency of the gas conversion . In the case of material synthesis applications of APP, it was reported that the gas flow often influences the production rate and even morphology of the synthesized product . Yet, a better understanding of the underlying principles and dependences is necessary to design an efficient and optimized process.…”

Section: Introductionmentioning

confidence: 99%

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Pressure as an additional control handle for non-thermal atmospheric plasma processes

Belov

Paulussen²,

Bogaerts

2017

Plasma Process Polym

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O 2 and CO 2 Dielectric Barrier Discharges (DBD) were studied at elevated (i.e., above atmospheric) pressure regimes (1-3.5 bar). It was demonstrated that these operational conditions significantly influence both the discharge dynamics and the process efficiencies of O 2 and CO 2 discharges. For the case of the O 2 DBD, the pressure rise results in the amplification of the discharge current, the appearance of emission lines of the metal electrode material (Fe, Cr, Ni) in the optical emission spectrum and the formation of a granular film of the erosion products (10-300 nm iron oxide nanoparticles) on the reactor walls. Somewhat similar behavior was observed also for the CO 2 DBD. The discharge current, the relative intensity of the CO Angstrom band measured by Optical Emission Spectroscopy (OES) and the CO 2 conversion rates could be stimulated to some extent by the rise in pressure. The optimal conditions for the O 2 DBD (P = 2 bar) and the CO 2 DBD (P = 1.5 bar) are demonstrated. It can be argued that the dynamics of the microdischarges (MD) define the underlying process of this behavior. It could be demonstrated that the pressure increase stimulates the formation of more intensive but fewer MDs. In this way, the operating pressure can represent an additional tool to manipulate the properties of the MDs in a DBD, and as a result also the discharge performance.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Pressure as an additional control handle for non-thermal atmospheric plasma processes

Belov

Paulussen²,

Bogaerts

2017

Plasma Process Polym

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“…[3] Furthermore, resistive switching has been observed in polycrystalline transition metal oxide thin films which eliminates the need for single-crystalline materials and related deposition challenges. [4,5] Although with many techniques for producing the vapor phase, such as arc discharge, [33,34] pulsed microplasma, [35,36] laser vaporization, [37,38] Joule heating, [39,40] or sputtering. [41,42] Core/shell nanoparticles using physical techniques have been formed via several different processes.…”

Section: Introductionmentioning

confidence: 99%

“…[ 32 ] The gas phase aggregation method is attracting interest due to its ability to work in high or ultrahigh vacuum environments, which guarantees the chemical purity of the nanoparticles and is compatible with device fabrication via conventional lithographic techniques. All gas phase aggregation techniques are based on nucleation and growth of nanoparticles from the saturated vapor phase of elements, with many techniques for producing the vapor phase, such as arc discharge, [ 33,34 ] pulsed microplasma, [ 35,36 ] laser vaporization, [ 37,38 ] Joule heating, [ 39,40 ] or sputtering. [ 41,42 ]…”

Section: Introductionmentioning

confidence: 99%

Resistive Switching in Individual Co/ZnO Core/Shell Nanoparticles Formed via Inert Gas Condensation and Selective Oxidation

Ahmadi

Mukherjee

et al. 2020

Adv Elect Materials

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Magnetron sputtering inert gas condensation is used to produce core/shell Co/ZnO nanoparticles. Selective oxidation to form the core/shell nanoparticles is accomplished both during nanoparticle formation (“in situ”) and with exposure to ambient conditions (“ex situ”). The ZnO formed in situ shows single‐crystalline nature with specific orientation relationships with the Co core, while the ZnO formed ex situ is polycrystalline. Conductive atomic force microscopy is utilized to measure the electrical behavior of individual nanoparticles, and both types of core/shell nanoparticles display classic bipolar resistive switching behavior. These results highlight potential application of these nanoparticles as promising next generation nonvolatile memories and neuromorphic computational devices.

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“…[26] However, these previous studies never demonstrated the fabrication of complicated multidirectional grown 3D structures. Furthermore, the fundamental mechanism for producing compact 3D microstructures has not been elucidated.…”

mentioning

confidence: 98%

Multifurcation Assembly of Charged Aerosols and Its Application to 3D Structured Gas Sensors

et al. 2016

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Approaching Gas Phase Electrodeposition: Process and Optimization to Enable the Self‐Aligned Growth of 3D Nanobridge‐Based Interconnects

Cited by 18 publications

References 24 publications

Pressure as an additional control handle for non-thermal atmospheric plasma processes

Pressure as an additional control handle for non-thermal atmospheric plasma processes

Resistive Switching in Individual Co/ZnO Core/Shell Nanoparticles Formed via Inert Gas Condensation and Selective Oxidation

Multifurcation Assembly of Charged Aerosols and Its Application to 3D Structured Gas Sensors

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