Applications of the Photodissolution Effect in Chalcogenide Glasses

Inorganic chalcogenide photoresists are widely used in microelectronics and optoelectronics. Here, we describe strongly nonlinear chalcogenide photoresists fabricated on the basis of Ag-doped As2S3 glassy films. Photoresists are prepared by vacuum coevaporation of As2S3 bulk glass and Ag. Superlinear dissolution characteristics of Ag-doped photoresists are explained in the framework of the so-called “percolation approach.” The advantages of superlinear photoresists for maskless photolithography are briefly discussed.

show abstract

Optical and Photoluminescence Properties of Erbium-Doped Chalcogenide Glasses (GeGaS:Er)

Kasap

Koughia

Soundararajan

et al. 2008

IEEE J. Select. Topics Quantum Electron.

View full text Add to dashboard Cite

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Applications of the Photodissolution Effect in Chalcogenide Glasses

Cited by 4 publications

References 44 publications

Optical properties change in laser-induced Te/As2Se3 chalcogenide thin films

Optical properties change in laser-induced Te/As2Se3 chalcogenide thin films

Nonlinear photoresists for maskless photolithography on the basis of Ag-doped As2S3 glassy films

Optical and Photoluminescence Properties of Erbium-Doped Chalcogenide Glasses (GeGaS:Er)

Contact Info

Product

Resources

About