1971
DOI: 10.1109/proc.1971.8365
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Applications of integrated circuit technology to microwave frequencies

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Cited by 48 publications
(14 citation statements)
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“…This experimental result is consistent with claims made in [4] based solely on analytical work. Contrary to concerns raised in [3] and [8], our measurements and analysis both show that the losses incurred by the use of a sufficiently thin adhesion layer are well below that induced by the bulk metal and substrate losses.…”
Section: Discussionsupporting
confidence: 92%
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“…This experimental result is consistent with claims made in [4] based solely on analytical work. Contrary to concerns raised in [3] and [8], our measurements and analysis both show that the losses incurred by the use of a sufficiently thin adhesion layer are well below that induced by the bulk metal and substrate losses.…”
Section: Discussionsupporting
confidence: 92%
“…Within the manufacturing domain, it is well known that chemical reactions between the thin film and ceramic substrate are necessary for strong adhesion to the ceramic substrate [6]. Titanium, chromium, or tantalum can be used as an adhesion layer on oxides and nitrides to allow deposition of other less adhesive films such as copper [4]- [7]. Unfortunately, these metals have a significantly lower conductivity than Cu, which could lead to increased conductor losses.…”
Section: Multilayered Thin-film Metal Systemsmentioning
confidence: 99%
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“…Owing to the still immature silicon IC technology in the early 1970s when yields were be as low as 10% or so, there was considerable debate that is well captured by Sobol [9] on whether microwave integrated circuits which contain a few transistors but many passive components are more economically realized in hybrid form on alumina substrates instead of on monolithic ICs. The consensus then leaned towards the hybrid integrated circuit (HIC), although it also went by the more ambiguous name of microwave integrated circuit (MIC).…”
Section: Microwave Integrated Circuits: Hybrid Vs Monolithicmentioning
confidence: 99%
“…be the light speed 3×10 8 m/s, hence, ε reff is the effective dielectric constant of the material as shown in equation (4)[9].…”
mentioning
confidence: 99%