Applications of diamond-like carbon thin films

Lettington, Alan H.

doi:10.1016/s0008-6223(98)00062-1

Cited by 206 publications

(86 citation statements)

References 44 publications

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“…[2][3][4] However, high level of residual compressive stress limits the films thickness to a few tens of nanometers and is the major drawback to their technological applications. Recently, it has been shown experimentally that an effective way to avoid the high residual stress of DLC films is the introduction of a small amount of Cu during the growth process.…”

Section: Introductionmentioning

confidence: 99%

Stress reduction of Cu-doped diamond-like carbon films from ab initio calculations

Wang

2015

AIP Advances

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Structure and properties of Cu-doped diamond-like carbon films (DLC) were investigated using ab initio calculations. The effect of Cu concentrations (1.56∼7.81 at.%) on atomic bond structure was mainly analyzed to clarify the residual stress reduction mechanism. Results showed that with introducing Cu into DLC films, the residual compressive stress decreased firstly and then increased for each case with the obvious deterioration of mechanical properties, which was in agreement with the experimental results. Structural analysis revealed that the weak Cu-C bond and the relaxation of both the distorted bond angles and bond lengths accounted for the significant reduction of residual compressive stress, while at the higher Cu concentration the increase of residual stress attributed to the existence of distorted Cu-C structures and the increased fraction of distorted C-C bond lengths.

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Section: Introductionmentioning

confidence: 99%

Stress reduction of Cu-doped diamond-like carbon films from ab initio calculations

Wang

2015

AIP Advances

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“…They can form predominantly amorphous films, such as diamond-like carbon (DLC) films, [1][2][3] tetrahedral amorphous carbon (ta-C) films, 2 and also as inherently nanostructured films as in the case of fullerene-like (FL) carbon films. 4 Unlike graphite and diamond, where carbon atoms exist in only one hybridization state (sp 2 and sp 3 , respectively), in carbon-based thin films carbon atoms with different hybridization coexist.…”

Section: Introductionmentioning

confidence: 99%

Carbon Fluoride, CF_x: Structural Diversity as Predicted by First Principles

et al. 2014

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Fluorinated carbon-based thin films offer a wide range of properties for many technological applications that depend on the microstructure of the films. To gain a better understanding on the role of fluorine in the structural formation of these films, CF x systems based on graphenelike fragments were studied by first principles calculations. Generally, the F concentration determines the type of film that can be obtained. For low F concentrations (up to ∼ 5 at.%), films with fullerene-like as well as graphite-like features are expected. Larger F concentrations (≥ 10 at.%) give rise to increasingly amorphous carbon films. Further increasing the F concentration in the films leads to formation of a polymer-like microstructure. In order to aid characterization of CF x systems generated by computational methods, a statistical approach is developed.

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“…Electron-driven chemistry of acetylene is important in key semiconductor and nanotechnology applications, e.g, acetylene is commonly used for carbon film deposition [1,2]. It is also of interest in astrophysics, e.g., acetylene has been identified in Titan's atmosphere [3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Ion-momentum imaging of dissociative-electron-attachment dynamics in acetylene

et al. 2014

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We present experimental results for dissociative electron attachment to acetylene near the 3 eV 2 Π g resonance. In particular, we use an ion-momentum imaging technique to investigate the dissociation channel leading to C 2 H − fragments. From our measured ion-momentum results we extract fragment kinetic energy and angular distributions. We directly observe a significant dissociation bending dynamic associated with the formation of the transitory negative ion. In modeling this bending dynamic with ab initio electronic structure and fixed-nuclei scattering calculations we obtain good agreement with the experiment.

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Applications of diamond-like carbon thin films

Cited by 206 publications

References 44 publications

Stress reduction of Cu-doped diamond-like carbon films from ab initio calculations

Stress reduction of Cu-doped diamond-like carbon films from ab initio calculations

Carbon Fluoride, CF_x: Structural Diversity as Predicted by First Principles

Ion-momentum imaging of dissociative-electron-attachment dynamics in acetylene

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Applications of diamond-like carbon thin films

Cited by 206 publications

References 44 publications

Stress reduction of Cu-doped diamond-like carbon films from ab initio calculations

Stress reduction of Cu-doped diamond-like carbon films from ab initio calculations

Carbon Fluoride, CFx: Structural Diversity as Predicted by First Principles

Ion-momentum imaging of dissociative-electron-attachment dynamics in acetylene

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Product

Resources

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Carbon Fluoride, CF_x: Structural Diversity as Predicted by First Principles