Application of the three-dimensional reconstruction method using scanning electron microscopy stereo images for calibration of step height standards in sub-micrometer range

Mityukhlyaev, V. B.; Maslov, V. G.; Ahbe, Th.; Dai, Gaoliang; Hu, Xiaolin; Diener, Alexander C.; Karabanov, D. A.; Milovanova, E. A.

doi:10.37795/rcem.2020.90.52.062

XXVIII Российская Конференция По Электронной Микроскопии И VI Школа Молодых Учёных "Современные Методы Электронной, Зондовой Ми 2020

DOI: 10.37795/rcem.2020.90.52.062

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Application of the three-dimensional reconstruction method using scanning electron microscopy stereo images for calibration of step height standards in sub-micrometer range

V. B. Mityukhlyaev¹,

V. G. Maslov²,

Th. Ahbe³

et al.

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Application of the three-dimensional reconstruction method using scanning electron microscopy stereo images for calibration of step height standards in sub-micrometer range

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