2015
DOI: 10.1088/1674-1137/39/6/066005
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Application of stratified implantation for silicon micro-strip detectors

Abstract: In the fabrication of a 48 mm×48 mm silicon micro-strip nuclear radiation detector with 96 strips on each side, a perfect P-N junction cannot be formed consistently by the one-step implantation process, and thus over 50% of strips produced do not meet application requirements. However, the method of stratified implantation not only avoids the P region between the surface of wafers and the P+ region, but also overcomes the shadow effect. With the help of the stratified implantation process, a perfect functional… Show more

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Cited by 2 publications
(2 citation statements)
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“…For cementitious permeable bricks, cement is used as a binder 15) during the hydration process, and crushed stone or sands with similar particle-size are used as aggregate. For the latter, 14,16,17) a mixture of clay and additives is the binder in the sintering process, and discarded ceramics become aggregates with a thermal stability. Compared with cementitious PPB, PPC have a higher production rate, better appearance and higher compressive strength.…”
Section: Mechanism Of Pore Formation In Novel Porous Permeable Ceramimentioning
confidence: 99%
See 1 more Smart Citation
“…For cementitious permeable bricks, cement is used as a binder 15) during the hydration process, and crushed stone or sands with similar particle-size are used as aggregate. For the latter, 14,16,17) a mixture of clay and additives is the binder in the sintering process, and discarded ceramics become aggregates with a thermal stability. Compared with cementitious PPB, PPC have a higher production rate, better appearance and higher compressive strength.…”
Section: Mechanism Of Pore Formation In Novel Porous Permeable Ceramimentioning
confidence: 99%
“…A new method of hydrothermal reaction for blast furnace slag was put forward. 18) And a lot of reports found that industrial solid waste, such as gangue 14,19) and other tailings 14,16,20) that contain clay minerals with plastic properties can play the role of clay and replace clay in ceramics.…”
Section: Mechanism Of Pore Formation In Novel Porous Permeable Ceramimentioning
confidence: 99%