Application of spatial interpolation to calculation of power spectrum density

Jiancheng, 徐建程 Xu; Qiao, 许乔 Xu; Liqun, 柴立群 Chai

doi:10.3788/hplpb20102207.1520

Cited by 1 publication

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“…Shiling Wang used linear laser beams to illuminate a fused silica sample and detected the position and size of defects using a dark-field imaging system [9]. Wang Yi used linear polarized light in a dark-field imaging system to obtain the qualitative relationship between the scratch size and the electric field intensity on the surface of fused quartz [10]. Combined with a microscopic scattering dark-field imaging system, Chai provided a detection scheme to test the surface defects of optical components by using linear polarized light [11].…”

Section: Introductionmentioning

confidence: 99%

Influence of light polarization state on the imaging quality of dark-field imaging system

Chen¹,

Wang²,

Zhang³

2022

J. Opt.

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Annular linear polarized light is used as the illumination source of the reflective dark-field detecting system in this paper. According to the theories of the Bidirectional Reflectance Distribution Function (BRDF) and multi-beam interference, the influence of the light polarization state on the intensity distribution of the scattering light is analyzed in detail. For surface defects, a simulation model of dark-field imaging is established based on the Finite-Difference Time-Domain method (FDTD). Both the near-field and the far-field scattering intensity distribution caused by surface defects are calculated under different illumination conditions. The incidence angle and polarization state of illumination light are optimized. Simulation and experimental results show that the image quality will be minimally affected by the interference effect while P-polarized light illuminates with the incident angle of 45°. The higher measurement accuracy of the dark-field imaging detection system can be obtained when the optimized illumination scheme is used.

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Section: Introductionmentioning

confidence: 99%