2009
DOI: 10.1002/elan.200804453
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Application of Multiway Chemometric Techniques for Analysis of AC Voltammetric Data

Abstract: Three multiway calibration techniques have been applied for determining of the suppressor concentration in industrial copper electrometallization baths used in semiconductor manufacturing. Parallel factor analysis (PARAFAC) for multiway array decomposition coupled with inverse least squares (ILS) regression (PARAFAC/ ILS), direct trilinear decomposition (DTLD) coupled with ILS (DTLD/ILS), and multilinear partial least squares (N-PLS) regression were employed to develop and test calibration models based on tril… Show more

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Cited by 14 publications
(41 citation statements)
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“…A constraint in selecting the optimum range is that it must be a multiple of the narrowest range. The number of times the optimum range is a multiple of the narrowest range is called denominator [19]. For instance, for the range of index k = 3 the value of denominator is 2 ( Table 2).…”
Section: Waveform Design For Specific Outlier Detectionmentioning
confidence: 99%
See 3 more Smart Citations
“…A constraint in selecting the optimum range is that it must be a multiple of the narrowest range. The number of times the optimum range is a multiple of the narrowest range is called denominator [19]. For instance, for the range of index k = 3 the value of denominator is 2 ( Table 2).…”
Section: Waveform Design For Specific Outlier Detectionmentioning
confidence: 99%
“…PARAFAC [30,31] is one of most commonly used multiway decomposition methods. Its concise description matching the formalism applied throughout this paper is presented in [19].…”
Section: Outlier Detection Techniquesmentioning
confidence: 99%
See 2 more Smart Citations
“…Wikiel et al [11] and Jaworski et al [12][13][14][15][16] extensively studied the application of soft modeling techniques for the development of analytical models aimed at accurately and robustly predicting the concentrations of deliberately added bath constituents. Also, Wikiel et al [17] and Jaworski et al [18] employed various soft modeling techniques for determinant analyses implemented online as early fault detection routines for industrial electroplating solutions.…”
Section: Introductionmentioning
confidence: 99%