Application of Gram-Schmidt decomposition for filtering of electron-beam-textured surfaces

Abstract

Surface topography is well known to affect functional behaviour of engineering surfaces. In particular in Automotive Industry, the micro-geometric propertiess of the panel surface will influence the forming and painting performance of the autobody panel.In response to this there has been an increasing emphasis on the three-dimensional nature of surfaces in terms of new characterisation techniques and new deterministic surfaces (as opposed to traditionally stochastic), which enable better process control.An innovative technique based on the Gram-Schmidt decomposition is introduced to jZter Electron-BeamTextured (EBr) deterministic surfaces. It is shown that this technique can be very effective in separating the deterministic pattern and obtain a noise-free reconstructed surface.

Advances in Micro and Nano-Scale Surface Metrology

“…are diagnostic. Techniques to characterise structured surfaces are still being researched with some very promising novel ideas being developed [25]. It is envisioned that pattern analysis, through feature parameters, will become a very important tool for the future in the surface texture toolbox and this will be an essential requirement of precision and nanoscale metrology of high aspect ratio features such as those resulting from MEMs processes…”