2017
DOI: 10.1016/j.snb.2016.11.016
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Application of a tunable Fabry-Pérot filtometer to mid-infrared gas sensing

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Cited by 17 publications
(10 citation statements)
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“…[ 16 ] Previous studies have also explored the miniaturization of microspectrometers for the near to mid‐infrared wavelength range using micro‐electromechanical systems (MEMS) technologies. These include voltage‐tunable Fabry–Pérot (FP) filters, [ 17,18 ] compact Michelson interferometers, [ 19 ] and tunable plasmonic metamaterials. [ 20 ] These methods have been proven to be effective, but the use of MEMS technologies also requires sophisticated fabrication processes.…”
Section: Introductionmentioning
confidence: 99%
“…[ 16 ] Previous studies have also explored the miniaturization of microspectrometers for the near to mid‐infrared wavelength range using micro‐electromechanical systems (MEMS) technologies. These include voltage‐tunable Fabry–Pérot (FP) filters, [ 17,18 ] compact Michelson interferometers, [ 19 ] and tunable plasmonic metamaterials. [ 20 ] These methods have been proven to be effective, but the use of MEMS technologies also requires sophisticated fabrication processes.…”
Section: Introductionmentioning
confidence: 99%
“…27 A micro-electro-mechanical system (MEMS)-based mid IR filter using a FP air resonator combined with a pyroelectric detector was first reported in 2003 and is now commercially distributed in several MIR wavelength ranges. 28,29 FP filterdetectors have been successfully paired with miniaturized pulsed MIR emitters were employed for process gas monitoring in transmission gas cells, [30][31][32] for liquid sensing, 33 imaging systems 34 as well as paired with a supercontinuum laser for standoff IR spectroscopy. 32 These reports achieved adequate analytical performance without the high spectral resolution and the full spectral coverage provided by FTIR spectrometers while reducing the costs and size of the respective sensing system.…”
Section: Introductionmentioning
confidence: 99%
“…In the past different approaches were used for the spectroscopic quantification of hydrocarbons. This includes Vis-NIR-spectroscopy [10], Fourier transform infrared spectroscopy (FTIR) [6] and the application of tunable filtometers [11] in the mid-infrared. The strongest fundamental absorption bands in the infrared for the alkanes are found at 3.3 µm wavelength attributed to CH stretching vibrations and around 6.8 µm wavelength due to bending vibrational modes of the CH bonds [12].…”
Section: Introductionmentioning
confidence: 99%