Applicability of X-ray fluorescence spectroscopy as method to determine thickness and composition of stacks of metal thin films: A comparison with imaging and profilometry

Vrielink, J.A.M.; Tiggelaar, Roald M.; Gardeniers, Han; Lefferts, Leon

doi:10.1016/j.tsf.2011.08.049

Cited by 35 publications

(24 citation statements)

References 34 publications

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“…Thin Film technology are less expensive compared with crystalline silicon (c‐Si). It uses few materials and limited manufacturing process; solar cell developed by this technology is very thin, around 35 to 260 nm . Thin Film technology is manufactured from thin films of semiconductor material having solid back material support.…”

Section: Solar Energymentioning

confidence: 99%

“…It uses few materials and limited manufacturing process; solar cell developed by this technology is very thin, around 35 to 260 nm. 104 Thin Film technology is manufactured from thin films of semiconductor material having solid back material support. The thickness of the semiconductor material are only a few micron (greater than 10 mm) compared with crystalline wafers having thickness several hundred microns.…”

Section: Thin Film Silicon Solar Cellsmentioning

confidence: 99%

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The progression of silicon technology acting as substratum for the betterment of future photovoltaics

Singh

Agrahari

2019

Int J Energy Res

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Summary To solve energy crisis, generation of clean and renewable energy sources are highly recommended. It not only solve energy‐related matters but also resolves environmental issues. A great number of renewable energy sources are present nowadays to resolve aforementioned issues, out of which photovoltaic modules is the preferable technology over others. Silicon is the native element to be used in photovoltaic module, due to its reasonable cost and band gap. The deciding parameters to harness solar energy to electricity rely upon solar irradiance and weather conditions. Here, we describe the rapid transformation of silicon as photovoltaic solar cell material that transfigured the photovoltaic industry. The photovoltaic industry initiated with monocrystalline silicon and multicrystalline silicon solar cell having conversion efficiency reached up to approximately 22.9% and 20.8%, respectively. The contemporary outburst for the trade of photovoltaic industry is due to the high manufacturing cost of silicon solar panels, which provided a chance for researchers to quest for advanced technology. It gave an opportunity for thin film solar cell to infiltrate in the market. This technology reduced the cost but on the expense of lower conversion efficiency.

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Section: Solar Energymentioning

confidence: 99%

Section: Thin Film Silicon Solar Cellsmentioning

confidence: 99%

The progression of silicon technology acting as substratum for the betterment of future photovoltaics

Singh

Agrahari

2019

Int J Energy Res

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“…As a result, by means of FP equations, the correctly integrated net intensity peaks are converted to the elemental concentration expressed in wt % or mol %. This software is usable for single layer coatings and can be applied to the analysis of elements in the energy range of 5 to 120 keV [28]. It is well known that when using the FP method, the thickness determination accuracy is lower for multi-layer samples, with standard deviations up to ±10%, compared with a single layer sample [29,30].…”

Section: Enhancing Calibration Protocolsmentioning

confidence: 99%

Enhanced XRF Methods for Investigating the Erosion-Resistant Functional Coatings

2019

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The development of erosion-resistant functional materials usable as plasma facing first wall components (PFC) is crucial for increasing the lifetime of future fusion reactors. Generally, PFCs have to be quality checked and characterized regarding their composition, before integrating them into the fusion reactor vessel. Enhanced X-ray fluorescence (XRF) methods represent an effective alternative to conventional analysis methods for the characterization of refractive metallic coatings on large areas of fusion materials. We have developed and applied XRF methods as fast and robust methods for the characterization of the thickness and composition uniformity of complex functional coatings. These coatings consist of tungsten included in multilayer configuration and deposited on low or high Z substrates. We have further developed customized calibration protocols for quantifying the element composition and layer thickness of each investigated sample. The calibration protocols are based on a combination of standard samples measurements, Monte Carlo simulations, and fundamental parameter theoretical calculations. The calibrated results are discussed considering a selection of relevant PFC samples. The deposition uniformity was successfully investigated for different PFC-relevant tiles and lamella shaped samples with W layers below and over the W L-line saturation thickness. Also, the 2D thickness mapping capability of the XRF method was demonstrated by studying the plasma post-erosion pattern.

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“…On the other hand, it has been reported that the quantitative results contained relative uncertainties in the range of 110% because the algorithm of the thin-film FP would be incomplete. 28) Therefore, when a novel sample is analyzed using the thin-film FP method, the accuracy of the results needs to be carefully investigated and the sensitivity factors of each analytical element are calibrated as may be necessary.…”

Section: )mentioning

confidence: 99%

Direct and Rapid Quantification of Calcium Phosphate Precipitate on Titanium by X-Ray Fluorescence Analysis Using Fundamental Parameter Method

et al. 2013

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In the present study, we propose a characterization technique to determine the amount of calcium phosphate (CP) precipitate formed on a titanium (Ti) substrate. The quantitative analysis of the CP precipitate on a metallic substrate is significant for researchers of metallic biomaterials because CP that spontaneously precipitates in a simulated-body fluid gives information on the bioactivity of the metallic biomaterials. We focused on X-ray fluorescence (XRF) analysis and adopted the thin-film fundamental parameter method (thin-film FP method) because it allows direct (non-pretreatment) and rapid quantitative analysis without any reference materials. We show that XRF analysis using the thin-film FP method can be adequately applied to the quantitative analysis of the CP precipitate in the simulated-body fluid immersion test. We also show that the density of the CP-precipitate layer can be estimated by combining the XRF results with images of cross-sectional scanning electron microscopy (SEM).Consequently, XRF analysis combined with the thin-film FP method can provide a convenient means to evaluate the CP precipitate on a Ti substrate, which improves the accuracy and accessibility of the simulated-body fluid immersion test.

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Applicability of X-ray fluorescence spectroscopy as method to determine thickness and composition of stacks of metal thin films: A comparison with imaging and profilometry

Cited by 35 publications

References 34 publications

The progression of silicon technology acting as substratum for the betterment of future photovoltaics

The progression of silicon technology acting as substratum for the betterment of future photovoltaics

Enhanced XRF Methods for Investigating the Erosion-Resistant Functional Coatings

Direct and Rapid Quantification of Calcium Phosphate Precipitate on Titanium by X-Ray Fluorescence Analysis Using Fundamental Parameter Method

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