Antireflective coatings on large scale substrates produced by reactive twin-magnetron sputtering

Szczyrbowski, J.; Bräuer, Günter; Teschner, G.; Zmelty, A.

doi:10.1016/s0022-3093(97)00129-4

Cited by 65 publications

(29 citation statements)

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“…However, their gas sensing performance for NH3 has not been widely exploited. Although various methodologies including magnetron sputtering, chemical vapor deposition and thermal oxidation techniques have been used to fabricate the films [39][40][41], sol-gel methodology is the most cost-effective technique.…”

Section: Introductionmentioning

confidence: 99%

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Tang

et al. 2018

Sensors and Actuators B: Chemical

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Northumbria University has developed Northumbria Research Link (NRL) to enable users to access the University's research output. Copyright © and moral rights for items on NRL are retained by the individual author(s) and/or other copyright owners. Single copies of full items can be reproduced, displayed or performed, and given to third parties in any format or medium for personal research or study, educational, or not-for-profit purposes without prior permission or charge, provided the authors, title and full bibliographic details are given, as well as a hyperlink and/or URL to the original metadata page. The content must not be changed in any way. Full items must not be sold commercially in any format or medium without formal permission of the copyright holder. The full policy is available online: http://nrl.northumbria.ac.uk/policies.html This document may differ from the final, published version of the research and has been made available online in accordance with publisher policies. To read and/or cite from the published version of the research, please visit the publisher's website (a subscription may be required.) This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. and SiO2-TiO2 films showed positive frequency shifts, whereas SiO2 film exhibits a negative frequency shift to NH3 gas. it is believed that the negative frequency shift was mainly caused by the increase of NH3 mass loading on the sensitive film while the positive frequency shift was associated to the condensation of the hydroxyl groups (-OH) on the film making the film stiffer and lighter, when exposed to NH3 gas. It demonstrated that humidity played a significant factor on the sensing performance. Comparative studies exhibited that the sensor based on the composite SiO2-TiO2 film had a much better sensitivity to NH3 at a low concentration level (1 ppm) with a response of 2 KHz, and also showed fast response and recovery, excellent selectivity, stability and reproducibility. Accepted Manuscript

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Section: Introductionmentioning

confidence: 99%

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Tang

et al. 2018

Sensors and Actuators B: Chemical

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“…The TiO 2 /SiO 2 multilayer is the most-used combination of dielectric for ARCs. Such a stack shows promising antireflective properties for glass [36,50,70,71,72,73] (see Figure 3a,b) or silicon [74] in visible wavelengths. Such multilayer ARCs are composed of a sequential stack of low and high RI dielectrics with a thickness of quarter-and-half wavelengths as shown in Figure 3c–e.…”

Section: Conventional Antireflective Coatings (Arcs)mentioning

confidence: 99%

Antireflective Coatings: Conventional Stacking Layers and Ultrathin Plasmonic Metasurfaces, A Mini-Review

2016

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Reduction of unwanted light reflection from a surface of a substance is very essential for improvement of the performance of optical and photonic devices. Antireflective coatings (ARCs) made of single or stacking layers of dielectrics, nano/microstructures or a mixture of both are the conventional design geometry for suppression of reflection. Recent progress in theoretical nanophotonics and nanofabrication has enabled more flexibility in design and fabrication of miniaturized coatings which has in turn advanced the field of ARCs considerably. In particular, the emergence of plasmonic and metasurfaces allows for the realization of broadband and angular-insensitive ARC coatings at an order of magnitude thinner than the operational wavelengths. In this review, a short overview of the development of ARCs, with particular attention paid to the state-of-the-art plasmonic- and metasurface-based antireflective surfaces, is presented.

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“…[4,7,24] In particular, middle frequency (MF) magnetron sputtering deposition has already been widely used in depositing carbon films, as it not only provides a good coating uniformity but also process stability and a high deposition rate. [25,26] However, the systematical investigation of the co-doping into a-C : H matrix has been rarely mentioned. Therefore, it is absolutely necessary to investigate the effects of the parameters on the microstructure of TiAl-doped a-C : H films to achieve the desired properties and further provide the essential technological parameters to accomplish industrialization in this film.…”

Section: Introductionmentioning

confidence: 99%

Influence of methane flow on the microstructure and properties of TiAl‐doped a‐C:H films deposited by middle frequency reactive magnetron sputtering

Pang

Shi

Wang

et al. 2009

Surface & Interface Analysis

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Hydrogenated TiAl-doped a-C : H films were deposited on Si substrates by middle frequency magnetron sputtering TiAl target in argon and methane gas mixture atmosphere. The surface morphology, hardness, chemical nature and bond types of the films were characterized by means of atomic force microscopy (AFM), XPS, Raman spectroscopy and nanoindentation. The friction and wear behaviors of the deposited films were characterized on an UMT-2MT test system. SEM was utilized to analyze the wear scar and debris on steel balls after sliding on the deposited films under dry friction conditions. The wear rate of the deposited films was calculated from traces of surface profiles taken across the wear track using an optical profile. The results demonstrated that the film deposited at 60 sccm methane flow exhibited higher hardness, as well as low friction coefficient and wear rate, which is attributed to the formation of a graphitized transfer layer.

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Antireflective coatings on large scale substrates produced by reactive twin-magnetron sputtering

Cited by 65 publications

References 0 publications

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Antireflective Coatings: Conventional Stacking Layers and Ultrathin Plasmonic Metasurfaces, A Mini-Review

Influence of methane flow on the microstructure and properties of TiAl‐doped a‐C:H films deposited by middle frequency reactive magnetron sputtering

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