Anti-Vibration Characteristics of a Lateral Shear Interferometer for On-Machine Surface Measurement

Liu, X.; Gao, Yongsheng; To, Suet; Lee, WB

doi:10.4028/www.scientific.net/kem.295-296.411

Cited by 4 publications

(9 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For this problem, a number of techniques have been proposed to reduce the effects of vibration. One required sophisticated optical settings [16][17][18][19][20][21]. Sivakumar et al [16] proposed an instantaneous phase shifting interferometry method in a vibrating environment.…”

Section: Vibrationmentioning

confidence: 99%

“…Gao et al [17] proposed an optical system based on a dual beam interferometric technique so that the effect of vibration can be isolated. A lateral shearing interferometer system based on the use of a birefringence plate was developed [18][19][20][21] technique required double sensors to subtract the vibration signal [2,22]. Veggel et al [23] proposed a special mechanical design for mounting of beam splitters for sufficient alignment stability.…”

Section: Vibrationmentioning

confidence: 99%

“…Veggel et al [23] proposed a special mechanical design for mounting of beam splitters for sufficient alignment stability. It can be seen that the existing techniques [2,[16][17][18][19][20][21][22][23] are complex and costly.…”

Section: Vibrationmentioning

confidence: 99%

“…To address the above problems in a single device for grinding research and for industrial use, based on our existing studies [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][17][18][19][20][21], a new single laser sensor design together with two techniques for in-process form error measurement is proposed. The proposed design is based on the use of an air beam [13,14] and is simple and costs less.…”

Section: Vibrationmentioning

confidence: 99%

See 3 more Smart Citations

An in-process form error measurement system for precision machining

Gao¹,

Huang²,

Zhang³

2010

Meas. Sci. Technol.

View full text Add to dashboard Cite

In-process form error measurement for precision machining is studied. Due to two key problems, opaque barrier and vibration, the study of in-process form error optical measurement for precision machining has been a hard topic and so far very few existing research works can be found. In this project, an in-process form error measurement device is proposed to deal with the two key problems. Based on our existing studies, a prototype system has been developed. It is the first one of the kind that overcomes the two key problems. The prototype is based on a single laser sensor design of 50 nm resolution together with two techniques, a damping technique and a moving average technique, proposed for use with the device. The proposed damping technique is able to improve vibration attenuation by up to 21 times compared to the case of natural attenuation. The proposed moving average technique is able to reduce errors by seven to ten times without distortion to the form profile results. The two proposed techniques are simple but they are especially useful for the proposed device. For a workpiece sample, the measurement result under coolant condition is only 2.5% larger compared with the one under no coolant condition. For a certified Wyko test sample, the overall system measurement error can be as low as 0.3 µm. The measurement repeatability error can be as low as 2.2%. The experimental results give confidence in using the proposed in-process form error measurement device. For better results, further improvement in design and tests are necessary.

show abstract

Section: Vibrationmentioning

confidence: 99%

Section: Vibrationmentioning

confidence: 99%

Section: Vibrationmentioning

confidence: 99%

Section: Vibrationmentioning

confidence: 99%

See 2 more Smart Citations

An in-process form error measurement system for precision machining

Gao¹,

Huang²,

Zhang³

2010

Meas. Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…There are two types of workpiece surface measurement method: contact measurement methods [5][6][7][8] and non-contact measurement methods [4,[9][10][11][12][13][14]. Contact methods may cause damage to the workpiece surface, such as scratches by the stylus.…”

Section: Introductionmentioning

confidence: 99%

A new multiple air beam approach for in-process form error optical measurement

Gao

2018

Meas. Sci. Technol.

View full text Add to dashboard Cite

In-process measurement can provide feedback for the control of workpiece precision in terms of size, roughness and, in particular, mid-spatial frequency form error. Optical measurement methods are of the non-contact type and possess high precision, as required for in-process form error measurement. In precision machining, coolant is commonly used to reduce heat generation and thermal deformation on the workpiece surface. However, the use of coolant will induce an opaque coolant barrier if optical measurement methods are used. In this paper, a new multiple air beam approach is proposed. The new approach permits the displacement of coolant from any direction and with a large thickness, i.e. with a large amount of coolant. The model, the working principle, and the key features of the new approach are presented. Based on the proposed new approach, a new in-process form error optical measurement system is developed. The coolant removal capability and the performance of this new multiple air beam approach are assessed. The experimental results show that the workpiece surface y(x, z) can be measured successfully with standard deviation up to 0.3011 µm even under a large amount of coolant, such that the coolant thickness is 15 mm. This means a relative uncertainty of 2σ up to 4.35% and the workpiece surface is deeply immersed in the opaque coolant. The results also show that, in terms of coolant removal capability, air supply and air velocity, the proposed new approach improves by, respectively, 3.3, 1.3 and 5.3 times on the previous single air beam approach. The results demonstrate the significant improvements brought by the new multiple air beam method together with the developed measurement system.

show abstract