A new lateral shearing interferometer for precision surface measurement

Liu, Xiaojun; Gao, Yongsheng; Chang, Ming

doi:10.1016/j.optlaseng.2009.03.019

Cited by 19 publications

(14 citation statements)

References 31 publications

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“…Thus, Eq. ( 15) can be rewritten as (16) By carrying out the derivation in a similar manner, the phase retardation caused by the presence of the pure BK7 substrate in the S 2 track can be expressed as (17) Finally, we can find the phase difference between those two tracks by subtracting Eq. ( 17) from Eq.…”

Section: Principle Of CI With the Presence Of A Samplementioning

confidence: 99%

“…The choice of the phase-shifting method for a particular application depends on available optical components coupled with its advantages deemed appropriate for the implementation. In this study, a cyclic interferometric configuration, which is less prone to the instability due to environmental disturbances, is chosen [16,17]. The proposed phase-shifting technique used to generate phase shifts for the setup is based on the mirror displacement and the combination of a quarter-wave retarder and a polarizer.…”

Section: Introductionmentioning

confidence: 99%

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Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films

et al. 2020

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An alternative polarization phase-shifting technique is proposed to determine the thickness of transparent thin-films. In this study, the cyclic interferometric configuration is chosen to maintain the stability of the operation against external vibrations. The incident light is simply split by a non-polarizing beam splitter cube to generate test and reference beams, which are subsequently polarized by a polarizing beam splitter. Both linearly polarized beams are orthogonal and counter-propagating within the interferometer. A wave plate is inserted into the common paths to introduce an intrinsic phase difference between the orthogonal polarized beams. A transparent thin-film sample, placed in one of the beam tracks, modifies the output signal in terms of the phase retardation in comparison with the reference beam. The proposed phase-shifting technique uses a moving mirror with a set of “fixed” polarizing elements, namely, a quarter-wave retarder and a polarizer, to facilitate phase extraction without rotating any polarizing devices. The measured thicknesses are compared with the measurements of the same films acquired using standard equipment such as the field-emission scanning electron microscope and spectroscopic ellipsometer. Experimental results with the corresponding measured values are in good agreement with commercial measurements. The system can be reliably utilized for non-destructive thickness measurements of transparent thin-films.

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Section: Principle Of CI With the Presence Of A Samplementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films

et al. 2020

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“…With the wide application of aspheric mirrors, its measurement problem has increasingly become a major problem that needs to be solved urgently for the promotion and application of aspheric surfaces 4 . Precisely testing the surface quality of aspheric surfaces is one of the most critical technologies for the wide application of aspheric surfaces, and it is also the basis for their high-precision processing 5 , 6 . To address the issues of measurement speed and precision and realize the dynamic, fast, and precise measurement of the aspheric surface shape, relevant scientific researchers in the field of optical measurement have conducted much theoretical and experimental research work.…”

Section: Introductionmentioning

confidence: 99%

“…4 Precisely testing the surface quality of aspheric surfaces is one of the most critical technologies for the wide application of aspheric surfaces, and it is also the basis for their high-precision processing. 5,6 To address the issues of measurement speed and precision and realize the dynamic, fast, and precise measurement of the aspheric surface shape, relevant scientific researchers in the field of optical measurement have conducted much theoretical and experimental research work. In recent years, the phase-shifting lateral shearing interferometry (LSI) technology has been widely used in the measurement of aspheric surface shape.…”

Section: Introductionmentioning

confidence: 99%

Analysis of the influence of simultaneous phase-shifting shearing interference polarizer

Tian

Wang

et al. 2022

Opt. Eng.

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The aspheric surface testing system based on the shearing interference principle is used to better analyze how the installation and fabrication errors of linear polarizer affects the precision of the aspheric surface. The effects of the angle error of the linear polarizer and the phase-shifting error of the wave plate on the reconstruction of the aspheric surface are studied. Constructing the model of the Jones matrix with the error term system, the reconstruction surface and residual after the corresponding error system are obtained using the four-step phaseshifting and differential Zernike method. The polarizer array of an angle of θ was varied from ðθ − 1 degÞ to ðθ þ 2 degÞ every 0.2 deg, and the changes of the fitting surface and the residual surface were simulated. The phase-shifting error of the simulated one-fourth wave plate was <λ∕300. Then, the change of the fitting surface and residual surface when these two errors exist at the same time were simulated. The simulation results show that the influence of the phaseshifting error of the wave plate on the fitting surface is much greater than the angle error of the polarizer array. When assembling the interference system, the phase-shifting error of the wave plate should be <λ∕300 when the light transmission angle error of the polarizer array is between −0.2 deg and 0.2 deg, which will ensure the testing precision of the aspheric surface testing system.

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“…Conventional interferometers such as the Fizeau and Twyman-Green interferometers have been widely used for precision surface testing [4][5]. There are many ways studied on the measurement of surface deviation [6], as knife-edge test [7] and other interference apparatus [8][9][10].…”

Section: Introductionmentioning

confidence: 99%

New system of miniaturization online testing of spherical interferometer

et al. 2011

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With the aim to measure the radius of curvature deviation and the surface form deviation of optical elements online in the workshop, based on laser testing technique, two solutions of miniaturization without precision guider sphericity interferometer systems are described, and the principle of systems are analyzed. Compared with the traditional sphericity interferometer, the systems designed are particularly suitable for testing mirror noncontact online in workshop, advantaged in compact structure, no precision guider, high efficiency and low costs. The interferometer systems use the different radius of curvature of existing spherical test plates in the production workshop to produce reference wavefront. The systems can not only get the astigmatism and local deviation of lens, but also can reflect the radius of curvature deviation, which provides rapid and nondestructive noncontact online testing.

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A new lateral shearing interferometer for precision surface measurement

Cited by 19 publications

References 31 publications

Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films

Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films

Analysis of the influence of simultaneous phase-shifting shearing interference polarizer

New system of miniaturization online testing of spherical interferometer

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