Anti-Reflection Properties of Black Silicon Coated with Thin Films of Metal Oxides by Atomic Layer Deposition

Properties of Black Silicon Layers Fabricated by Different Techniques for Solar Cell Applications

“…The properties of BS and the photovoltaic parameters of BS-based solar cells mainly depend on the geometric parameters (height, base diameter, periodicity) of the needles and the surface passivation quality. [8,11,15,24,28] Here, based on the results of our early research, [7,17,21,36,37,48] samples with optimized properties (low reflectivity and high lifetime) were prepared for each BS-specific fabrication technique. The starting substrates were p-type (boron-doped) double-side polished Cz-Si wafers with a resistivity of 3.0 Ω cm and an orientation of (100).…”

“…The tetrakis (ethylmethylamino) hafnium (TEMAH) and DI H 2 O precursor system with pure N 2 as the carrier gas was used, similar to those reported in ref. [21]. The samples were subsequently annealed at 400 °C in N 2 for 15 min to activate the surface passivation.…”

“…on the surface of BS. [11,16,[19][20][21] In this aspect, the deposition of thin films by atomic layer deposition (ALD) is preferred due to the high conformity and low defect density achievable. Moreover, by using thin ALD HfO 2 films, the antireflection properties of structures with BS layers can be further improved.…”

“…Moreover, by using thin ALD HfO 2 films, the antireflection properties of structures with BS layers can be further improved. [19,21] In addition, HfO 2 films are good protective layers against chemical and mechanical degradation under harsh environmental conditions.…”

Исследование Структурных И Оптических Свойств Кремниево-Перовскитных Структур Со Слоем Из Черного Кремния

“…Исследования показывают, что для достижения наименьшей величины отражения кремниевых подложек, наиболее эффективным решением является применение нанотекстурированных поверхностей, в частности, из черного кремния (black silicon, b-Si) [20][21][22][23][24][25][26]. Структурно b-Si имеет игольчатую поверхность в виде закругленных в вершинах конусообразных выступов или бугорков высотой 0.3-10 мкм и диаметром менее 1.0 мкм.…”