“…Many studies have been done on CeO 2 layer deposition using various methods; such as electron beam evaporation, 1-3 ion beam deposition, 4 sputtering, 5,6 molecular beam epitaxy, 7,8 pulsed laser deposition, 9 chemical vapor deposition, 10 and sol-gel coating; 11 for various applications, such as electronic materials, oxygen storage catalysts, [11][12][13] and gas sensors. Many studies have been done on CeO 2 layer deposition using various methods; such as electron beam evaporation, 1-3 ion beam deposition, 4 sputtering, 5,6 molecular beam epitaxy, 7,8 pulsed laser deposition, 9 chemical vapor deposition, 10 and sol-gel coating; 11 for various applications, such as electronic materials, oxygen storage catalysts, [11][12][13] and gas sensors.…”