Room temperature ferromagnetic semiconductor rutile Ti 1-x Co x O 2-δ (101) epitaxial thin films were grown on r-sapphire substrates by a dc sputtering method. Ferromagnetic magnetization, magnetic circular dichroism, and anomalous Hall effect were clearly observed at room temperature in sputter-grown films for the first time. The magnetization value is nearly as large as 3μ B /Co that is consistent with the high spin state Co 2+ in this compound recently established by spectroscopic methods.Consequently, its originally large magneto-optical response is further enhanced. The base pressure of the deposition chamber was 3 × 10 -8 Torr. During the growth, Ar (6N) gas was supplied at a rate of 340 standard-cm 3 /minutes and the total pressure was 5 × 10 -3 Torr. The films were grown at 400 ˚C with sputtering dc power of 100 W. The thickness of the films was 80-110 nm. The crystal structure and Co content were determined, respectively, by powder x-ray diffraction and electron probe microanalysis.The surface morphology was examined using atomic force microscope and scanning electron microscope. The magnetization was measured in magnetic field normal to the film plane with superconducting quantum interference device magnetometer. The transmission and reflectance spectra were measured by a standard spectrometer to deduce the absorption spectra of the films. Magnetic circular dichroism (MCD) was measured with a magnetic field normal to the film plane (Faraday configuration). The resistivity and Hall effect were measured for photolithographically patterned Hall bars (60 μm wide × 220 μm long). Electron density (n e ) was deduced from normal part of the Hall resistance, i.e., the linear slope component with respect to the magnetic field. as shown in inset of Fig. 1(a). The scanning electron microscopy and atomic force 4 microscopy confirmed no surface precipitations. The root mean square roughness of the films was within several nanometers in area of 5 μm square. From the electron probe microanalysis, the Co content was revealed to be the same as that of prescribed Co content in the targets.