Anodization of the valve metals Al, Ti, Zr, Nb, Hf, Ta, and W leads to formation of barrier-type (compact) or self-organized porous-type anodic oxide films, depending on the electrolytes used. The oxide films formed are dielectrics or semiconductors with useful properties that make them of great interest for many applications, including solid electrolytic capacitors, solar cells, photocatalysis, electrochromic devices, and selfcleaning materials.[1-2] Here we report the first example of an anodic oxide with high proton conductivity below 200 8C. Proton-conducting thin films are promising electrolytes for solid-oxide fuel cells that operate at intermediate temperatures (100-400 8C) and other electrochemical devices. [3] Intermediate-temperature fuel cells have several advantages over polymer electrolyte fuel cells, which operate below 100 8C, under fully hydrated conditions.[4] The former type allows the use of nonprecious-metal electrocatalysts [5] and hydrocarbon fuels [6] and facilitates simpler module assembly by means of anhydrous proton conductors.Inorganic solid acids such as CsHSO 4 , Rb 3 H(SeO 4 ) 2 , and CsH 2 PO 4 exhibit sufficient proton conductivities fuel-cell operation, but their poor processability and low stability limit their practical application.[7] ZrO 2 /WO 3 is a very attractive acid catalyst that displays high catalytic activity and stability in demanding reactions that require strong Brønsted acidity. [8] The acid strength of this material has been reported to be H o À14.5 and is comparable with that of fully anhydrous hydrofluoric acid.[9] The proton-transport properties of this material are therefore of great interest.For practical use of a solid electrolyte in fuel-cell technology, the area-specific resistivity (ASR) of the electrolyte should be below 0.2 W cm 2 .[10] To obtain a sufficiently low ASR value at temperatures below 400 8C, one approach is reducing the thickness of the solid electrolyte to the nanometer scale. Shim et al. reported atomic-layer deposition of yttria-stabilized zirconia nanofilms of 60 nm thickness, which showed high ion conductivity as an electrolyte for solid-oxide fuel cells operated at and below 350 8C.[11] The high proton conductivity of nanofilms below 400 8C has also been reported for amorphous metallosilicate [12] and zirconium pyrophosphate [13] nanofilms prepared by a layer-by-layer sol-gel process. Native protons in these amorphous nanofilms contribute to efficient ionic conduction even in a dry atmosphere. Anodic oxide films formed on valve metals usually contain hydrogen species. [14] It is likely that high proton conductivity occurs in anodic oxide if the oxide is strongly acidic. In addition, the anodizing process is suitable for fabricating nanofilms of a desired thickness, since the thickness of barrier-type anodic oxide films changes linearly with the formation voltage. In this work, we prepared ZrO 2 /WO 3 nanofilms by anodizing magnetron-sputtered Zr/50 atom % W alloy films with flat surfaces. The obtained anodic oxide films showed high pr...