2021
DOI: 10.3390/coatings11111268
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Annealing Effect on the Contact Angle, Surface Energy, Electric Property, and Nanomechanical Characteristics of Co40Fe40W20 Thin Films

Abstract: This study investigated Co40Fe40W20 single-layer thin films according to their corresponding structure, grain size, contact angle, and surface energy characteristics. Co40Fe40W20 alloy thin films of different thicknesses, ranging from 10 to 50 nm, were sputtered on Si(100) substrates by DC magnetron sputtering. The thin films were annealed under three conditions: as-deposited, 250 °C, and 350 °C temperatures, respectively. The Scherrer equation was applied to calculate the grain size of Co40Fe40W20 thin films.… Show more

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Cited by 6 publications
(3 citation statements)
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References 38 publications
(44 reference statements)
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“…At an annealing temperature of 300 °C, as the thickness increases from 10 to 50 nm, hardness and Young’s modulus increase from 10.26 to 15.34 GPa and from 216.42 to 230.78 GPa, respectively. The experimental results demonstrate that although temperature does not significantly change the hardness and modulus, the hardness and Young’s modulus of Si(100) increase significantly as the film thickness increases, and the effect of thickness is significant [ 35 , 36 ].…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…At an annealing temperature of 300 °C, as the thickness increases from 10 to 50 nm, hardness and Young’s modulus increase from 10.26 to 15.34 GPa and from 216.42 to 230.78 GPa, respectively. The experimental results demonstrate that although temperature does not significantly change the hardness and modulus, the hardness and Young’s modulus of Si(100) increase significantly as the film thickness increases, and the effect of thickness is significant [ 35 , 36 ].…”
Section: Resultsmentioning
confidence: 99%
“…However, when annealing at 200 °C, the behavior is different with respect to the other samples, as it is increasing. It can be reasonably assumed that the amount of oxides affects the surface energy [ 29 , 36 ]. According to the XRD results, the formation of more oxide layers on the thinner film surfaces results in increased contact angles and decreased surface energy [ 37 ].…”
Section: Resultsmentioning
confidence: 99%
“…Figure 8b depicts a graph of the Young's modulus of the CoFeY films, which exhibits an increasing trend with increasing thickness that progressively leveled out, with a maximum value of 235.9 GPa for the 50 nm thick as-deposited film. The experimental results revealed that the hardness and elastic modulus of the Si (100) substrate did not vary considerably with temperature; nevertheless, when the film thickness grew, the hardness and elastic modulus of the Si (100) substrate increased dramatically [35,36].…”
Section: Hardness and Young's Modulusmentioning
confidence: 96%